Top

Microsystem Technologies

Published in:

06-08-2015 | Technical Paper

High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation

Authors: Geng Wang, Guoqiang Chen, Fuzhong Bai

Published in: Microsystem Technologies | Issue 10/2016

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

A novel composite control strategy is developed in this paper to compensate hysteresis, resonance and disturbances in a piezo-actuated nanopositioner. The control objective of the piezoelectric positioner is to achieve high tracking performance in terms of accuracy and speed. For this purpose, a Bouc–Wen model based hysteresis compensator is first applied to mitigate the hysteresis nonlinearity without the complex inverse hysteresis calculation. And then, the linear dynamic of the hysteresis compensated system is identified and inverted to account for the resonance. A model-based inversion feed-forward controller is designed to achieve high speed tracking. Afterwards, a high-gain feedback controller is designed based on a notch filter to handle the modeling inaccuracy and all kinds of disturbances. So, the feed-forward controller can be augmented to the feedback controller to realize high speed and precision tracking. The enhancement of tracking performance is demonstrated through several comparative experiments. The performance of 70 Hz bandwidth and 0.281 μm precision can be achieved, which validated the effectiveness of the proposed composite control scheme.

previous article Enhancement of metal coil quality on selective p-silicon based planar electromagnetic coil by thermal annealing process

next article Differential C4D sensor for conductive and non-conductive fluidic channel

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Al Janaideh M, Rakheja S, Su CY (2011) An analytical generalized Prandtl–Ishlinskii model inversion for hysteresis compensation in micropositioning control. IEEE/ASME Trans Mechatron 16(4):734–744CrossRef

Ando T, Uchihashi T, Fukuma T (2008) High-speed atomic force microscopy for nanovisualization of dynamic biomolecular processes. Prog Surf Sci 83:337–437CrossRef

Braunsmann C, Schaffer TE (2010) High-speed atomic force microscopy for large scan sizes using small cantilevers. Nanotechnology 21:225705CrossRef

Chae KW, Kim W-B, Jeong YH (2011) A transparent polymeric flexure-hinge nanopositioner, actuated by a piezoelectric stack actuator. Nanotechnology 22:335501CrossRef

Chang S, Yi J, Shen Y (2009) Disturbance observer-based hysteresis compensation for piezoelectric actuators. In: Proceedings of American control conference, pp 4196–4201

Chen X, Li Y (2007) A modified PSO structure resulting in high exploration ability with convergence guaranteed. IEEE Trans Cybern 37(5):1271–1289CrossRef

Chen BM, Lee TH, Hang CC, Guo Y, Weerasmriya S (1999) An H-infinite almost disturbance decoupling robust controller design for a piezoelectric bimorph actuator with hysteresis. IEEE Tran Autom Control 7(2):160–174

Clayton GM, Tien S, Leang KK, Zou Q, Devasia S (2009) A review of feedforward control approaches in nanopositioning for high-speed SPM. J Dyn Syst Meas Control 131(6):061101CrossRef

Croft D, Shed G, Devasia S (2001) Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. ASME J Dyn Syst Meas Control 123(1):35–43CrossRef

Garrett MC, Szuchi T, Kam KL et al (2009) A review of feedforward control approaches in nanopositioning for high-speed SPM. J Dyn Syst Meas Control-Trans ASME 131(6):061101CrossRef

Ge P, Jouaneh M (1996) Tracking control of a piezoceramic actuator. IEEE Trans Control Syst Technol 4(3):209–216CrossRef

Goldfarb M, Celanovic N (1997) Modeling piezoelectric stack actuators for control of micromanipulation. IEEE Contr Syst Mag 17(3):69–79CrossRefMATH

Gozen BA, Ozdoganlar OB (2012) A method for open-loop control of dynamic motions of piezo-stack actuators. Sens Actuators A Phys 184:160–172CrossRef

Gu GY, Zhu LM (2011) Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses. Sens Actuators A Phys 165(2):202–209CrossRef

Gu G, Zhu L (2013a) Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation. Sens Actuat A Phys 197:76–87CrossRef

Gu G-Y, Zhu L-M (2013b) Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation. Sens Actuators A Phys 197:76–87CrossRef

Gu GY, Zhu LM, Su CY, Ding H (2013) Motion control of piezoelectric positioning stages: modeling, controller design and experimental evaluation. IEEE/ASME Trans Mechatron 18(5):1459–1471CrossRef

Gu G, Zhu L, Su C (2014) Integral resonant damping for high-bandwidth control of piezoceramic stack actuators with asymmetric hysteresis nonlinearity. Mechatronics 24(4):367–375CrossRef

Higuchi T (2010) Next generation actuators leading breakthroughs. J Mech Sci Technol 24:13–18CrossRef

Huang D, Xu J-X, Venkataramanan V, The Cat Tuong Huynh (2014) High-performance tracking of piezoelectric positioning stage using current-cycle iterative learning control with gain scheduling. IEEE Trans Industr Electron 61(2):1085CrossRef

Humphris ADL, Miles MJ, Hobbs JK (2005) A mechanical microscope: high-speed atomic force microscopy. Appl Phys Lett 86:034106CrossRef

Leang KK, Devasia S (2007) Feedback-Linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators. IEEE Transac Control Syst Technol 15(5):927–935CrossRef

Leang KK, Zou Q, Devasia S (2009) Feedforward control of piezoactuators in atomic force microscope systems inversion-based compensation for dynamics and hysteresis. IEEE Control Syst Mag 29(1):70–82MathSciNetCrossRef

Liaw HC, Shirinzadeh B (2009) Neural network motion tracking control of piezo-actuated flexure-based mechanisms for micro-/nanomanipulation. IEEE/ASME Trans Mechatron 15(4):517–527CrossRef

Lei L et al (2013) Discrete composite control of piezoelectric actuators for high-speed and precision scanning. IEEE Trans Ind Inf 9(2):859–868CrossRef

Lin C-M, Li H-Y (2014) Intelligent control using the wavelet fuzzy CMAC backstepping control system for two-axis linear piezoelectric ceramic motor drive systems. IEEE Trans Fuzzy Syst 22(4):791–802CrossRef

Liu L, Tan KK, Lee TH (2014) Multirate-based composite controller design of piezoelectric actuators for high-bandwidth and precision tracking. IEEE Trans Control Syst Technol 22:2CrossRef

Mahmood I, Moheimani S (2009) Making a commercial atomic force microscope more accurate and faster using positive position feedback control. Rev Sci Instrum 80:063705CrossRef

Pantazi A, Sebastian A, Cherubini G, Lantz M, Pozidis H, Rothuizen H, Eleftheriou E (2007) Control of MEMS-based scanning-probe data-storage devices. IEEE Trans Control Syst Technol 15:824–841CrossRef

Rakotondrabe M (2011) Bouc–Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators. IEEE Trans Autom Sci Eng 8(2):428–431CrossRef

Ruppel T, Osten W, Sawodny O (2011) Model-based feedforward control of large deformable mirrorsg. Eur J Control 3:261–272MathSciNetCrossRefMATH

Shieh HJ, Hsu CH (2008) An adaptive approximator-based backstepping control approach for piezoactuator-driven stages. IEEE Trans Ind Electron 55(4):1729–1738CrossRef

Tao G, Kokotovic PV (1995) Adaptive Control of Plants with Unknown Hysteresis. IEEE Trans Autom Control 40(2):200–212MathSciNetCrossRefMATH

Tian F, Li K, Wang J, Wang H (2014) Adaptive backstepping sliding mode control of fast steering mirror driven by piezoelectric actuator. High Power Laser Part Beams 26(1):59–63

Tuma T, Lygeros J, Kartik V, Sebastian A, Pantazi A (2012) High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories. Nanotechnology 23:185501CrossRef

Vettiger P, Cross G, Despont M et al (2002) The millipede-nanotechnology entering data storage. IEEE Trans Nanotechnol 1:39–55CrossRef

Viswamurthy S, Ganguli R (2007) Modeling and compensation of piezoceramic actuator hysteresis for helicopter vibration control. Sens Actuators A Phys 135(2):801–810CrossRef

Vorbringer-Dorozhovets N, Hausotte T, Manske E, Shen JC, Jager G (2011) Novel control scheme for a high-speed meteorological scanning probe microscope. Meas Sci Technol 22(9):094012CrossRef

Wang G, Rao C (2015) Adaptive control of piezoelectric fast steering mirror for high precision tracking application. Smart Mater Struct 24(3):035019CrossRef

Wang G, Guan C, Zhang X, Zhou H, Rao C (2014) Precision control of piezo-actuated optical deflector with nonlinearity correction based on hysteresis model. Opt Laser Technol 57:26–31CrossRef

Geng W, Jianwei N, Fuzhong B (2015) High precision tracking control of piezoelectric fast steering mirror based on self-tuning PID algorithm. J Henan Polytech Univ (Natural Science) accept

Wong PK, Xu Q, Vong CM, Wong HC (2012) Rate-dependent hysteresis modeling and control of a piezostage using online support vector machine and relevance vector machine. IEEE Trans Ind Electron 59(4):1988–2001CrossRef

Wu Y, Zou Q (2009) Robust inversion-based 2-DOF control design for output tracking: piezoelectric-actuator example. IEEE Trans Control Syst Technol 17(5):1069–1082CrossRef

Zhenyan W, Zhen Z, Jianqin M (2012) Precision tracking control of piezoelectric actuator based on Bouc–Wen hysteresis compensator. Electron Lett 48(23):1459–1460CrossRef

Title: High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation
Authors: Geng Wang
Guoqiang Chen
Fuzhong Bai
Publication date: 06-08-2015
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 10/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-015-2638-9

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 10/2016

Annealing temperature effect on structural, optical, morphological and electrical properties of CdS/Si(100) nanostructures

An overview of magnetic micro-robot systems for biomedical applications

Sensitivity improvement using optimized heater design for dual axis thermal accelerometers

Characterizing mechanical behaviors of a flexible AMOLED during the debonding process

The evaluation of nanotribological property of nano thin film under different environment by atomic force microscopy

Manufacturing of integrative membrane carriers by novel powder injection molding