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Published in: Microsystem Technologies 10/2016

02-07-2015 | Technical Paper

The evaluation of nanotribological property of nano thin film under different environment by atomic force microscopy

Authors: Jen-Ching Huang, Fu-Jen Cheng

Published in: Microsystem Technologies | Issue 10/2016

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Abstract

This study was based on an atomic force microscopy (AFM) to study the nanotribological property of Cr–N–Cu nanocomposite thin film under air and deionized (DI) water environment. Using the force curve test to get the normal force of probe, and the friction force was measured by the loop method. And then nanotribological experiments can be carried out under air and deionized (DI) water environment by a AFM. After Nanotribological experiments, we found that the coefficient of friction (COF) value of Cr–Cu–N nanocomposite thin film in DI water is significantly higher than that in air. And it can be found that whether in the air or DI water, the tip speed increases, the COF value decreases. In the air, the normal force increases, the COF value also increases, but, a different trend is observed in DI water.

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Metadata
Title
The evaluation of nanotribological property of nano thin film under different environment by atomic force microscopy
Authors
Jen-Ching Huang
Fu-Jen Cheng
Publication date
02-07-2015
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 10/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2610-8

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