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Published in: Microsystem Technologies 10/2016

27-06-2015 | Technical Paper

Mechanism design with rotational and positioning calibrations for double-sided structure replication

Authors: Cheng-Hsien Wu, Cheng-Hao Chiu

Published in: Microsystem Technologies | Issue 10/2016

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Abstract

This study is designing a mechanism with functions of rotational and positioning calibrations. This mechanism was applied to a hot embossing mold used for replications of double-sided structure. The hot embossed product was measured for double sided structures. The rotational and positioning alignment errors for both sides were measured by using a microscope. According to the results, the errors were calibrated wit this mechanism. The positioning and rotational resolutions of this mechanism are 40 μm and 0.5°, respectively. The results show that the mechanism has acceptable calibration accuracy. The average calibration accuracy for X-axis, Y-axis and C-axis were 92.5, 91.75 and 98.67 %, respectively. The small errors were induced by the large temperature difference between upper die and lower die during rapid cooling of a hot embossing process.

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Metadata
Title
Mechanism design with rotational and positioning calibrations for double-sided structure replication
Authors
Cheng-Hsien Wu
Cheng-Hao Chiu
Publication date
27-06-2015
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 10/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2592-6

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