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Journal of Sol-Gel Science and Technology
Published in: Journal of Sol-Gel Science and Technology 1/2020

30-07-2020 | Original Paper: Functional coatings, thin films and membranes (including deposition techniques)

Improved properties of Pb(Zr0.52Ti0.48)O3 films by hot plate annealing on LaNiO3 bottom electrode

Authors: S. Q. Yin, A. D. Liu, Y. Y. Zhang, K. S. Venkatesh, M. Manikandan, Y. C. Shi, P. Y. Chen, M. Z. Hou, S. Y. Shang, J. Shang, X. W. Wang

Published in: Journal of Sol-Gel Science and Technology | Issue 1/2020

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Abstract

Pb(Zr0.52Ti0.48)O3 (PZT) perovskite ferroelectric thin films were fabricated on LaNiO3 buffer silicon substrate by sol–gel spin coating technique. The thickness of PZT films was about 150 nm, and the thickness of LNO films as electrodes was about 120 nm. The prepared PZT thin films were annealed by hot plate annealing and conventional electric furnace annealing at various temperatures for 30 min. The microstructure of annealed films was analyzed by different techniques. The obtained results demonstrated that the perovskite phase can be achieved in films by both methods of annealing. Structural and morphological characterizations substantiated that hot plate annealing method can facilitate the formation of perovskite phase of PZT films than the electric furnace annealing. Consequently, the films annealed using hot plate exhibited more excellent electrical properties. The higher dielectric permittivity, remnant polarization, and the lower dielectric dissipation were observed for the thin films annealed at 550 °C by the hot plate. The values of remnant polarization and coercive field of PZT annealed on the hot plate were 36.4 μC/cm2 and 168 kV/cm, respectively. These results demonstrated that the crystallization of ferroelectric PZT films was improved by hot plate annealing.
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Literature
1.
Miyazaki H, Goto T, Miwa Y, Ohno T, Suzuki H, Ota T, Takahashi M (2004) Preparation and evaluation of LaNiO3 thin film electrode with chemical solution deposition. J Eur Ceram Soc 24:1005–1008CrossRef
2.
Zhu TJ, Lu L, Lai MO (2006) Growth and electrical properties of highly (001)-oriented Pb(Zr0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(100). Sens Actuator A-Phys 125:335–339CrossRef
3.
Zhang SQ, Li WL, Li N, Fei WD (2010) Effects of lanthanum doping on the microstructure and electrical properties of sol-gel derived Pb1-3x/2Lax(Zr0.5Ti0.5)O3 thin films. Phys B 405:2585–2588CrossRef
4.
Xue SW, Zu XT, Zhou WL, Deng HX, Xiang X, Zhang L, Deng H (2008) Effects of post-thermal annealing on the optical constants of ZnO thin film. J Alloy Compd 448:0–26CrossRef
5.
Kim CJ, Lee WJ, No K (1998) Control of preferred orientation in sol-gel lead-zirconate-titanate film on Pt/Ti/glass substrate. Thin Solid Films 312:130–134CrossRef
6.
Zhu MW, Wang ZJ, Chen YN, Kobayashi T, Maeda R (2013) Effect of heating rate on microstructure and electrical properties of sol-gel derived lead zirconate titanate films crystallized by rapid thermal annealing. Thin Solid Films 540:73–78CrossRef
7.
Han HJ, Chen YN, Wang ZJ (2015) Effect of heating rates on the crystallization process of (111)-oriented lead zirconate titanate thin films prepared by the sol-gel method. Ceram Int 41:15208–15216CrossRef
8.
Huang W, Jiang SW, Li YR, Zhu J, Zhang Y, Wei XH, Zeng HZ (2006) Crystallization behavior and domain structure in textured Pb(Zr0.52Ti0.48)O3 thin films by different annealing processes. Thin Solid Films 500:138–143CrossRef
9.
Jian L, Yi Z, Ikehara T, Mihara T, Maeda R (2007) Effects of rapid thermal annealing on nucleation, growth, and properties of lead zirconate titanate films. IEEE Trans Ultrason Ferroelectr Freq Control 54:2548–2554CrossRef
10.
Ko F-H, Hsu Y-C, Wang M-T, Huang GS (2007) Fabrication of a gas sensor with a piezoelectric PZT film deposited by a novel hydrothermal microwave-assisted annealing. Microelectron Eng 84:1300–1304CrossRef
11.
Imhoff L, Barolin SA, Pellegri NS, Stachiotti MG (2019) Sol-gel synthesis and characterization of 0.5Pb(Zr0.52Ti0.48)O3-0.5Pb(Fe0.5Nb0.5)O3 thin films. Ferro Electr 545:1–9
12.
Miyazaki T, Imai T, Wakiya N, Sakamoto N, Fu D, Suzuki H (2010) Low-temperature crystallization of CSD-derived PZT thin film with laser annealing. Mater Sci Eng B 173:89–93CrossRef
13.
Chen YN, Wang ZJ, Yang T, Zhang ZD (2014) Crystallization kinetics of amorphous lead zirconate titanate thin films in a microwave magnetic field. Acta Mater 71:1–10CrossRef
14.
Imhoff L, Barolin S, Pellegri N, Stachiotti MG (2017) Chelate route for the synthesis of PbZrxTi1−xO3 thin films. J Sol-Gel Sci Technol 83:375–381CrossRef
15.
Palneedi H, Maurya D, Geng LD, Song H-C, Hwang G-T, Peddigari M, Annapureddy V, Song K, Oh YS, Yang S-C, Wang YU, Priya S, Ryu J (2018) Enhanced self-biased magnetoelectric coupling in laser-annealed Pb(Zr,Ti)O3 thick film deposited on Ni foil. ACS Appl Mater Interfaces 10:11018–11025CrossRef
16.
Yamano A, Kozuka H (2007) effects of the heat-treatment conditions on the crystallographic orientation of Pb(Zr,Ti)O3 thin films prepared by polyvinyl pyrrolidone-assisted sol-gel method. J Am Ceram Soc 90:3882–3889
17.
Sama N, Herdier R, Jenkins D, Soyer C, Remiens D, Detalle M, Bouregba R (2008) On the influence of the top and bottom electrodes—A comparative study between Pt and LNO electrodes for PZT thin films. J Cryst Growth 310:3299–3302CrossRef
18.
Wang GS, Rémiens D, Soyer C, Dogheche E, Cattan E (2005) The effect of LaNiO3 bottom electrode thickness on ferroelectric and dielectric of (100) oriented PbZr0.53Ti0.47O3 films. J Cryst Growth 284:184–189CrossRef
19.
Izyumskaya N, Alivov Y-I, Cho S-J, Morkoc H, Lee H, Kang Y-S (2007) Processing, structure, properties, and applications of PZT thin films. Crit Rev Solid State Mat Sci 32:111–202CrossRef
20.
Wang ZJ, Chu JR, Maeda R, Kokawa H (2002) Effect of bottom electrodes on microstructures and electrical properties of sol-gel derived Pb(Zr0.53 Ti0.47)O3 thin films. Thin Solid Films 416:66–71CrossRef
21.
Li J, Wang C, Liu M, Ma J (2013) Effect of annealing process on properties of Pb(Zr0.52Ti0.48)O3 thin films prepared by sol-gel method. Ferroelectrics 445:32–38CrossRef
22.
Li J-K, Yao X (2005) Preparation and study on epitaxial Pb(Zr0.52Ti0.48)O3 ferroelectric films on different substrates. Acta Phys Sin 54:2938–2944
23.
Liu M, Li X, Lou J, Zheng S, Du K, Sun NX (2007) A modified sol-gel process for multiferroic nanocomposite films. J Appl Phys 102:083911CrossRef
24.
Kim SS, Bae JC, Kim W-J (2005) Fabrication and ferroelectric studies of (Bi, Gd)4Ti3O12 thin films grown on Pt/Ti/SiO2/Si and p-type Si substrates. J Cryst Growth 274:394–401CrossRef
25.
Chae BG, Yang YS, Lee SH, Jang MS, Lee SJ, Kim SH, Baek WS, Kwon SC (2002) Comparative analysis for the crystalline and ferroelectric properties of Pb(Zr,Ti)O3 thin films deposited on metallic LaNiO3 and Pt electrodes. Thin Solid Films 410:107–113CrossRef
26.
Singh SK, Ishiwara H, Sato K, Maruyama K (2007) Microstructure and frequency dependent electrical properties of Mn-substituted BiFeO3 thin films. J Appl Phys 102:094109CrossRef
27.
Zhao X, Jiang D, Yu S, Cheng J (2012) Structure and electrical properties of PZT/LNO/PT multilayer films on stainless steel substrates. Rare Met 31:272–275CrossRef
28.
Pabst GW, Martin LW, Chu Y-H, Ramesh R (2007) Leakage mechanisms in BiFeO3 thin films. Appl Phys Lett 90:072902CrossRef
29.
Che L, Cheng J, Yu S, Meng Z (2007) The effect of LaNiO3 buffer layer thickness on the electric properties of Pb(Zr0.53Ti0.47)O3 thin films deposited on titanium foils. Mater Lett 61:3068–3070CrossRef
30.
Borowiak AS, Niu G, Pillard V, Agnus G, Lecoeur P, Albertini D, Baboux N, Gautier B, Vilquin B (2012) Pulsed laser deposition of epitaxial ferroelectric Pb(Zr,Ti)O3 films on silicon substrates. Thin Solid Films 520:4604–4607CrossRef
31.
Zhang XD, Lin T, Meng XJ, Sun JL, Chu JH, Park S, Kwon H, Hwang J, Park G (2009) Structures and properties of PZT(52/48) thin films with different substrate temperature and oxygen percentage in mixed Ar and O2 Gas on LNO/Si (100) by sputtering. Integr Ferroelectr 113:63–71CrossRef
Metadata
Title
Improved properties of Pb(Zr0.52Ti0.48)O3 films by hot plate annealing on LaNiO3 bottom electrode
Authors
S. Q. Yin
A. D. Liu
Y. Y. Zhang
K. S. Venkatesh
M. Manikandan
Y. C. Shi
P. Y. Chen
M. Z. Hou
S. Y. Shang
J. Shang
X. W. Wang
Publication date
30-07-2020
Publisher
Springer US
Published in
Journal of Sol-Gel Science and Technology / Issue 1/2020
Print ISSN: 0928-0707
Electronic ISSN: 1573-4846
DOI
https://doi.org/10.1007/s10971-020-05378-w

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