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Microsystem Technologies
Published in: Microsystem Technologies 4/2015

01-04-2015 | Technical Paper

Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

Authors: Pengfei Zhu, Binghe Ma, Chengyu Jiang, Jinjun Deng, Yunlong Wang

Published in: Microsystem Technologies | Issue 4/2015

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Abstract

Drive current is an important parameter of thermal shear stress sensor. Increasing drive current is helpful for enhancing its sensitivity. However, there must be an allowable drive current for the sake of safe working temperature of the sensor. How to make full use of drive current to increase the sensor’s sensitivity working underwater was studied. If the allowable drive current in still water and the current in stream water are used to drive the sensor in lower and higher shear stress input ranges, respectively, sensitivity of the sensor will be enhanced with the sensor working under a safe temperature. The both currents were separately determined by analyzing I–V characteristic and output voltage-shear stress relationship. We can improve the sensor’s sensitivity from 11.8 to 27.5 mV/Pa when shear stress input was 0.4 Pa.
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Metadata
Title
Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement
Authors
Pengfei Zhu
Binghe Ma
Chengyu Jiang
Jinjun Deng
Yunlong Wang
Publication date
01-04-2015
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2015
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2304-7

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