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Published in: Microsystem Technologies 3/2023

21-03-2023 | Technical Paper

Induction heating of dual magnetic particles embedded PDMS molds for roller embossing applications

Authors: Ming-Huai Hsu, Yao-Yang Tsai, Jyun-Wei He, Sen-Yeu Yang

Published in: Microsystem Technologies | Issue 3/2023

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Abstract

Roller embossing is an effective manufacturing process for replicating microstructures onto polymeric substrates, featuring high-volume production, rapid manufacturing, and large-area processing. Polydimethylsiloxane (PDMS) is a cost-effective mold material that is easy to replicate, but its easy deformability may cause mold distortion under a high roller embossing pressure. Furthermore, PDMS is not an effective induction heating mold because of its high thermal resistance and poor conductivity. Therefore, this research confronted the three main challenges of PDMS: low hardness, poor thermal conductivity, and heating inefficiency. We proposed a PDMS mold embedded with dual magnetic particles (DMP-PDMS), which can improve the hardness and thermal conductivity of PDMS and be directly heated by induction heating. This study designed and constructed a roll-embossing apparatus to fabricate polymer microlens arrays using DMP-PDMS composite molds. It is the first study to use dual magnetic particles embedded in PDMS for direct induction heating and generate an internal heat source to 220 °C within 60 s. Compared with a single type of magnetic particle embedded in PDMS, the heating efficiency is increased by 134%. This study demonstrates the feasibility and potential of induction heating DMP-PDMS molds for rolling embossing instead of replicating microstructures with metal molds.

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Literature
go back to reference Ahmed TJ, Stavrov D, Bersee HEN, Beukers A (2006) Induction welding of thermoplastic composites—an overview. Compos Part A 37:1638–1651CrossRef Ahmed TJ, Stavrov D, Bersee HEN, Beukers A (2006) Induction welding of thermoplastic composites—an overview. Compos Part A 37:1638–1651CrossRef
go back to reference Chang J-H, Cheng F-H, Chao C-C, Weng Y-C, Yang S-Y (2005) Direct imprinting using soft mold and gas pressure for large area and curved surfaces. J Vac Sci Technol A 23:1687CrossRef Chang J-H, Cheng F-H, Chao C-C, Weng Y-C, Yang S-Y (2005) Direct imprinting using soft mold and gas pressure for large area and curved surfaces. J Vac Sci Technol A 23:1687CrossRef
go back to reference Chang C-Y, Yang S-Y, Sheh J-L (2006) A roller embossing process for rapid fabrication of microlens arrays on glass substrates. Microsyst Technol 12:754–759CrossRef Chang C-Y, Yang S-Y, Sheh J-L (2006) A roller embossing process for rapid fabrication of microlens arrays on glass substrates. Microsyst Technol 12:754–759CrossRef
go back to reference Chang C-Y, Yang S-Y, Chu M-H (2007) Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process. Microelectron Eng 84:355–361CrossRef Chang C-Y, Yang S-Y, Chu M-H (2007) Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process. Microelectron Eng 84:355–361CrossRef
go back to reference Cheng C, Ke K-C, Yang S-Y (2017) Application of graphene–polymer composite heaters in gas-assisted micro hot embossing. RSC Adv 7:6336–6344CrossRef Cheng C, Ke K-C, Yang S-Y (2017) Application of graphene–polymer composite heaters in gas-assisted micro hot embossing. RSC Adv 7:6336–6344CrossRef
go back to reference Goral VN, Hsieh Y-C, Petzold ON, Faris RA, Yuen P-K (2010) Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds. J Micromech Microeng 21:017002CrossRef Goral VN, Hsieh Y-C, Petzold ON, Faris RA, Yuen P-K (2010) Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds. J Micromech Microeng 21:017002CrossRef
go back to reference Haimbaugh RE (2001) Practical induction heat treating. ASM Int 06098G:8–14 Haimbaugh RE (2001) Practical induction heat treating. ASM Int 06098G:8–14
go back to reference Hsu M-H, Tsai Y-Y, Yang S-Y (2022) Induction heating ferromagnetic particles embedded PDMS mold for microstructure embossing. J Phys Commun 6:025002CrossRef Hsu M-H, Tsai Y-Y, Yang S-Y (2022) Induction heating ferromagnetic particles embedded PDMS mold for microstructure embossing. J Phys Commun 6:025002CrossRef
go back to reference Jeroish ZE, Bhuvaneshwari KS, Samsuri F, Narayanamurthy V (2022) Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19. Biomed Microdev 24:3CrossRef Jeroish ZE, Bhuvaneshwari KS, Samsuri F, Narayanamurthy V (2022) Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19. Biomed Microdev 24:3CrossRef
go back to reference Kao C-C, Ke K-C, Hung W-C, Yang S-Y (2019) Hot embossing of microstructure with moving induction heating and gas-assisted pressuring. Microsyst Technol 26:957–967CrossRef Kao C-C, Ke K-C, Hung W-C, Yang S-Y (2019) Hot embossing of microstructure with moving induction heating and gas-assisted pressuring. Microsyst Technol 26:957–967CrossRef
go back to reference Kim S-M, Kang S (2003) Replication qualities and optical properties of UV-moulded microlens arrays. J Phys D: Appl Phys 36:2451–2456CrossRef Kim S-M, Kang S (2003) Replication qualities and optical properties of UV-moulded microlens arrays. J Phys D: Appl Phys 36:2451–2456CrossRef
go back to reference Kim K, Park S, Lee J-B, Manohara H, Desta Y, Murphy M, Ahn C-H (2002) Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology. Microsyst Technol 9:5–10CrossRef Kim K, Park S, Lee J-B, Manohara H, Desta Y, Murphy M, Ahn C-H (2002) Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology. Microsyst Technol 9:5–10CrossRef
go back to reference Kim JA, Lee SH, Park H, Kim JH, Park TH et al (2010) Microheater based on magnetic nanoparticle embedded PDMS. Nanotechnology 21:165102CrossRef Kim JA, Lee SH, Park H, Kim JH, Park TH et al (2010) Microheater based on magnetic nanoparticle embedded PDMS. Nanotechnology 21:165102CrossRef
go back to reference Kuphaldt TR (2007) Lessons in electric circuits vol. II–AC sixth edition, 77–79 Kuphaldt TR (2007) Lessons in electric circuits vol. II–AC sixth edition, 77–79
go back to reference Lee B, Jung S, Min SW, Park JH (2001) Three-dimensional display by use of integral photography with dynamically variable image planes. Opt Lett 26:1481CrossRef Lee B, Jung S, Min SW, Park JH (2001) Three-dimensional display by use of integral photography with dynamically variable image planes. Opt Lett 26:1481CrossRef
go back to reference Lee B-K, Kim D-S, Kwon T-H (2004) Replication of microlens arrays by injection molding. Microsyst Technol 10:531–535CrossRef Lee B-K, Kim D-S, Kwon T-H (2004) Replication of microlens arrays by injection molding. Microsyst Technol 10:531–535CrossRef
go back to reference Liu Y, Zhang P, Deng Y et al (2014) Polymeric microlens array fabricated with PDMS mold-based hot embossing. J Micromech Microeng 24:095028CrossRef Liu Y, Zhang P, Deng Y et al (2014) Polymeric microlens array fabricated with PDMS mold-based hot embossing. J Micromech Microeng 24:095028CrossRef
go back to reference Narasimhan J, Papautsky I (2004) Polymer embossing tools for rapid prototyping of plastic microfluidic devices. J Micromech Microeng 14:96–103CrossRef Narasimhan J, Papautsky I (2004) Polymer embossing tools for rapid prototyping of plastic microfluidic devices. J Micromech Microeng 14:96–103CrossRef
go back to reference Nian S-C, Huang M-S, Tsai T-H (2014) Enhancement of induction heating efficiency on injection mold surface using a novel magnetic shielding method. Int Commun Heat Mass Transf 50:52–60CrossRef Nian S-C, Huang M-S, Tsai T-H (2014) Enhancement of induction heating efficiency on injection mold surface using a novel magnetic shielding method. Int Commun Heat Mass Transf 50:52–60CrossRef
go back to reference Ong N-S, Koh Y-H, Fu Y-Q (2002) Microlens array produced using hot embossing process. Microelectron Eng 60:365–379CrossRef Ong N-S, Koh Y-H, Fu Y-Q (2002) Microlens array produced using hot embossing process. Microelectron Eng 60:365–379CrossRef
go back to reference Ren H, Lin Y-H, Wu S-T (2006) Viewing-angle-enhanced integral imaging system using a curved lens array. Opt Commun 261:296–299CrossRef Ren H, Lin Y-H, Wu S-T (2006) Viewing-angle-enhanced integral imaging system using a curved lens array. Opt Commun 261:296–299CrossRef
go back to reference Yang S-Y, Cheng F-S, Xu S-W, Huang P-H, Huang T-C (2008) Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform. Microelectron Eng 85:603–609CrossRef Yang S-Y, Cheng F-S, Xu S-W, Huang P-H, Huang T-C (2008) Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform. Microelectron Eng 85:603–609CrossRef
go back to reference Yeo LP, Ng SH, Wang ZF et al (2010) Investigation of hot roller embossing for microfluidic devices. J Micromech Microeng 20:015017CrossRef Yeo LP, Ng SH, Wang ZF et al (2010) Investigation of hot roller embossing for microfluidic devices. J Micromech Microeng 20:015017CrossRef
Metadata
Title
Induction heating of dual magnetic particles embedded PDMS molds for roller embossing applications
Authors
Ming-Huai Hsu
Yao-Yang Tsai
Jyun-Wei He
Sen-Yeu Yang
Publication date
21-03-2023
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 3/2023
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-023-05436-7

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