Skip to main content
Top

1984 | OriginalPaper | Chapter

Influence of Alkali Metals on the Negative Secondary Ion Emission from Silicon

Authors : W. Frentrup, M. Griepentrog, H. Klose, G. Kreysch, U. Mueller-Jahreis

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

The utility of ion implantation to investigate the influence of reactive ions on the secondary ion emission has been demonstrated by COLLIGON and KIRIAKIDES [1] in the case of copper matrix material.

Metadata
Title
Influence of Alkali Metals on the Negative Secondary Ion Emission from Silicon
Authors
W. Frentrup
M. Griepentrog
H. Klose
G. Kreysch
U. Mueller-Jahreis
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-82256-8_12