Top

Advances in Manufacturing

Published in:

01-12-2014

Integrated color defect detection method for polysilicon wafers using machine vision

Authors: Zai-Fang Zhang, Yuan Liu, Xiao-Song Wu, Shu-Lin Kan

Published in: Advances in Manufacturing | Issue 4/2014

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

For the typical color defects of polysilicon wafers, i.e., edge discoloration, color inaccuracy and color non-uniformity, a new integrated machine vision detection method is proposed based on an HSV color model. By transforming RGB image into three-channel HSV images, the HSV model can efficiently reduce the disturbances of complex wafer textures. A fuzzy color clustering method is used to detect edge discoloration by defining membership function for each channel image. The mean-value classifying method and region growing method are used to identify the other two defects, respectively. A vision detection system is developed and applied in the production of polysilicon wafers.

previous article RETRACTED ARTICLE: Effects of roller burnishing process parameters on surface roughness of A356/5%SiC composite using response surface methodology

next article Fabrication method of ultra-small gradient-index fiber probe

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Stupca M, Alsalhi M, Saud TA et al (2007) Enhancement of polycrystalline silicon solar cells using ultrathin films of silicon nanoparticle. Appl Phys Lett 91(6):063107CrossRef

Karunagaran B, Chung SJ, Velumani S (2007) Effect of rapid thermal annealing oil the properties of PECVD SiN_x thin films. Mater Chem Phys 106(1):130–133CrossRef

Yoo JS, So JH, Yu GJ et al (2011) Study on hydrogenated silicon nitride for application of high efficiency crystalline silicon solar cells. Solar Energy Mater Solar Cells 95(1):7–10

Otani T, Hirata M (2003) High rate deposition of silicon nitride films by APCVD. Thin Solid Films 442:44–47CrossRef

Schlemm H, Mai A, Roth S et al (2003) Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources. Surf Coat Technol 208:174–175

Zhang Y, Wang Y, Cai M et al (2012) Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap. Microelectron Eng 97(9):20–25CrossRef

Wang S, Lennon A, Tjahjono B et al (2012) Overcoming over-plating problems for PECVD SiN_x passivated laser doped p-type multi-crystalline silicon solar cells. Solar Energy Mater Solar Cells 99(1):226–234CrossRef

Cavaliere P, Santis AD, Panella F et al (2009) Thermo elasticity and CCD analysis of crack propagation in AA6082 friction stir welded joints. Int J Fatigue 31(2):385–392

Jimenez AR, Ceres R, Pons JL (2000) A survey of computer vision methods for location fruit on trees. Trans ASAE 43(6):1911–1920CrossRef

10.

Liu P, Tu K, Pan QL et al (2009) Persimmon’s surface defect recognition based on machine vision fuzzy clustering. Acta Opt Sin 29(s2):138–144

11.

Wu GF, Xu K, Yang ZL (2010) The online inspection technology of steel plate surface quality. Science Press, Beijing

12.

Sheng XC (2011) Research on solar mono-crystanine silicon wafer surface quality inspection based on image processing. Dissertation, Chang’an University

13.

Tsai DM, Wu SC, Li WC (2012) Defect detection of solar cells in electroluminescence images using Fourier image reconstruction. Solar Energy Mater Solar Cells 99(1):250–262CrossRef

14.

Chan TF, Kang SH, Shen JH (2001) Non-texture inpainting by curvature driven diffusions (CDD). J Vis Commun Image Represent 12(4):436–449CrossRef

15.

Lachance S, Bauer R, Warkentin A (2004) Application of region growing method to evaluate the surface condition of grinding wheels. Int J Mach Tools Manuf 44(7/8):823–829CrossRef

16.

Yau HT, Lin YK, Tsou LS et al (2008) An adaptive region growing method to segment inferior alveolar nerve canal from 3D medical images for dental implant surgery. Comput Aided Design Appl 5(5):743–752CrossRef

Title: Integrated color defect detection method for polysilicon wafers using machine vision
Authors: Zai-Fang Zhang
Yuan Liu
Xiao-Song Wu
Shu-Lin Kan
Publication date: 01-12-2014
Publisher: Shanghai University
Published in: Advances in Manufacturing / Issue 4/2014
Print ISSN: 2095-3127
Electronic ISSN: 2195-3597
DOI: https://doi.org/10.1007/s40436-014-0095-9

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 4/2014

Kinematic analysis and simulation of a new-type robot with special structure

Crystal structure and formation mechanism of the secondary phase in Heusler Ni-Mn-Sn-Co materials

Review of the first principles calculations and the design of cathode materials for Li-ion batteries

Modeling and simulation of percussive impact for robotic riveting system

A synchronized strategy to minimize vehicle dispatching time: a real example of steel industry

Virtual engineering in design and manufacturing

Premium Partners