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01-03-2014 | Technical Paper

Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

Authors: Ashish Kumar Sharma, Navneet Gupta

Published in: Microsystem Technologies | Issue 3/2014

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Abstract

This paper presents an attempt to reduce the actuation voltage of capacitive RF-MEMS switch by introducing the concept of non-uniform serpentine flexure suspensions. The spring constant of non-uniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method (FEM). FEM analysis indicate actuation voltage as low as 5 V with single meander section for the proposed non-uniform serpentine spring design, which is reasonably low as compared to uniform serpentine spring with same span beam length.

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Balaraman D, Bhattacharya SK, Ayazi F, Papapolymerou J (2002) Low-cost low actuation voltage copper RF-MEMS switches. IEEE Microw Theory Tech Symp 2:1225–1228

Cho II-J, Song T, Baek S-H, Yoon E (2005) Low voltage and low power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces. IEEE Trans Microw Theory Tech 53:2450–2457CrossRef

Fedder GK (1994) Simulation of microelectromechanical systems. Phd dissertation, Electrical Engineering and Computer Science, University of California

Goldsmith C, Lin T-H, Powers B, Wu W-R, Norvell B (1995) Micromechanical membrane switches for microwave applications. IEEE Microw Theory Tech Symp 1:91–94

Hah D, Yoon E, Hong S (2000) A low voltage actuated micromachined microwave switch using torsion springs and leverage. IEEE Trans Microw Theory Tech 1:2540–2545

Jensen BD, Wan Z, Chow L, Saitou K, Kurabayashi K, Volakis JL (2003) Integrated electrothermal modeling of RF-MEMS switches for improved power handling capability. In: IEEE topical conference on wireless communication technology, pp 10–11

Jaecklin VP, Linder C, de Rooij NF (1993) Optical microshutters and torsional micromirrors for light modulator arrays. In: IEEE micro electro mechanical systems workshop proceedings, Florida, February 1993, pp 124–127

Lee S-D, Jun B-C, Kim S-D, Park H-C, Rhee J-K, Mizuno K (2006) An RF-MEMS switch with low-actuation voltage and high reliability. J Microelectromech Sys 15:1605–1611CrossRef

Peroulis D (2003) RF-MEMS devices for multifunctional integrated circuits and antennas. Phd thesis, The University of Michigan

Pacheco S, Nguyen C-T, Katehi LPB (1998) Micromechanical electrostatic K-band switches. IEEE Microw Theory Tech Symp 3:1569–1572

Pacheco S, Nguyen C-T, Katehi LPB (2000) Design of low actuation voltage RF MEMS switch. IEEE Microw Theory Tech Symp 1:165–168

Pisano AP, Cho Y-H (1989) Mechanical design issues in laterally-driven microstructures. In: 5th international conference on solid-state sensors and actuators technical digest, Switzerland, June 1989, pp 1060–1064

Rizk JB, Muldavin JB, Tan G-L, Rebeiz GM (2000) Design of X-band MEMS microstrip shunt switches. In: 30th European microwave conference, 2000, pp 1–4

Rebeiz GM (2003) RF MEMS: theory, design, and technology, 3rd edn. John Wiley, New JerseyCrossRef

Timoshenko SP, Goodier JN (1970) Theory of elasticity, 3rd edn. McGraw-Hill, New YorkMATH

Yao JJ, Chang MF (1995) A surface micro machined miniature switch for telecommunications applications with signal frequencies from dc up to 4 ghz. In: The 8th international conference on solid-state sensors and actuators, and Eurosensors IX, Stockholm, June 1995, pp 384–387

Zhang ZL, MacDonald N (1991) An Rie process for submicron, silicon electromechanical structures in technical digest. In: 6th international conference on solid–state sensors and actuators, 1991, pp 520–523

Title: Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch
Authors: Ashish Kumar Sharma
Navneet Gupta
Publication date: 01-03-2014
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 3/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-013-1930-9

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