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Microsystem Technologies
Erschienen in: Microsystem Technologies 3/2014

01.03.2014 | Technical Paper

Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

verfasst von: Ashish Kumar Sharma, Navneet Gupta

Erschienen in: Microsystem Technologies | Ausgabe 3/2014

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Abstract

This paper presents an attempt to reduce the actuation voltage of capacitive RF-MEMS switch by introducing the concept of non-uniform serpentine flexure suspensions. The spring constant of non-uniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method (FEM). FEM analysis indicate actuation voltage as low as 5 V with single meander section for the proposed non-uniform serpentine spring design, which is reasonably low as compared to uniform serpentine spring with same span beam length.
Vorheriger Artikel Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators
Nächster Artikel The design and fabrication of a low-field NMR probe based on a multilayer planar microcoil

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Metadaten
Titel
Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch
verfasst von
Ashish Kumar Sharma
Navneet Gupta
Publikationsdatum
01.03.2014
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 3/2014
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-013-1930-9

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