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Microsystem Technologies

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01-04-2007 | Technical Paper

Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

Authors: Ghader Rezazadeh, Faraz Khatami, Ahmadali Tahmasebi

Published in: Microsystem Technologies | Issue 7/2007

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Abstract

In this paper the electromechanical behavior of a torsional micromirror was investigated using of a static model with considering torsion and bending characteristics of micro-beams. A set of nonlinear equations based on the parallel plate capacitor model was derived to represent the relationships between the applied voltage, torsion angle, and vertical displacement of the torsional micromirror. Step by step linearization method (Newton’s method) was used to calculate the rotation angle and vertical displacement of the micromirror due to the applied voltage. This method is fast and gave acceptable and accurate results which were in good agreement with the experimental data.

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Afrang S, Rezazadeh Gh (2004) Design and simulation of simple and varying section cantilever and fixed–fixed end types MEMS switches, ICSE Proceedings 2004, Kuala Lumpur

Albuquerque NM (1999) Sandia micromirrors may be part of next generation space telescope, news in the webpage http://www.sandia.gov on November 11, 1999

Cohn RW (1992) Link analysis of a deformable mirror device based optical crossbar switch. Opt Eng 31(1):134–140CrossRef

Degani O, Socher E, Lipson A, Leitner T, Setter DJ, Kaldor S, Nemirovskey Y (1998) Pull-in study of an electrostatic torsion micromirror. J Microelectromech Syst 7, No. 4, December

Dickensheets DL, Kino RG (1998) Silicon-micromachined scanning confocal optical microscope. J Microelectromech Syst 7:38–47CrossRef

Ford JE, Aksyuk VA, Bishop DJ, Walker JA (1999) Wavelength add-drop switching using tilting micromirrors. J Lightwave Technol 17:904–911CrossRef

Hornbeck LJ (1983) 128 × 128 deformable mirror devices. IEEE Trans Electron Devices ED-30(5):539–545

Hornbeck LJ (1989) Deformable-mirror spatial light modulators, Spatial Light Modulators and Applications III. SPIE Crit 1150:86–102

Hornbeck LJ (1991) Spatial light modulator and method, US Pat 5:061– 049

Huang JM, Liu AQ, Deng ZL, Zhang QX, Ahn J, Asundi A (2004) An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors. Sens Actuators A 115:159–167CrossRef

Kurth S, Hahn R, Kanfmann C, Kehr K, Mehner J, Wollmann V, Dotzel W, Gessner T (1998) Silicon mirrors and micromirror arrays for spatial laser beam modulation. Sens and Actuators A 66:76–82CrossRef

Lin T-H (1994) Implementation and characterization of a flexure-beam micromechanical spatial light modulator. Opt Eng 33(11):3643–3648CrossRef

Muller RS, Lau KY (1998) Surface-micromachined microoptical elements and systems. Proc IEEE 86(8):1705–1720CrossRef

Petersen KE (1980) Silicon torsional scanning mirror. IBM J Res Dev 24(5):631–637CrossRef

Rezazadeh Gh, Tahmasebi A, Mikhail Zubtsov (2006) Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage. J Microsyst Technol 12(12):1163–1170CrossRef

Sadeghian H, Rezazadeh Gh, Malekpour E (2006) Pull-in phenomenon investigation of nanoelectromechanical systems. J Phys Conf Ser 34:1123–1126CrossRef

H Sadeghian, Rezazadeh Gh, Ayla Shafipour, E Malekpou (2006) Pull-in voltage of fixed–fixed end type MEMS switches with variative electrostatic area. J Sens Transducers 66(4):526–533

Pouria Soleymani, Hamed Sadeghian, Ahmadali Tahmasebi, Ghader Rezazadeh (2006) Pull-in instability investigation of circular micro pump subjected to nonlinear electrostatic force. J Sens Transducers 69(7):622–628

Timoshenko SP, Goodier JN (1970) Theory of elasticity, 3rd edn. McGraw-Hill New York, sec 109

Toshiyoshi H, Fujita H (1996) Electrostatic micro torsion mirrors for an optical switch matrix. J Microelectromech Syst 5:231–237CrossRef

Van Kessel PF, Hornbeck LJ, Meier RE, Douglass MR (1998) MEMS-based projection display. Proc IEEE 86(8):1687– 1704CrossRef

Walker JA (2000) The future of MEMS in telecommunications networks. J Micromech Microeng 10:R1–R7CrossRef

Younse JM (1993) Mirrors on a chip. IEEE Spectr 30:27–31CrossRef

Zhao JP, Cheu HL, Huang JM, Liu AQ (2005) A study of dynamic characteristics and simulation of MEMS torsional micromirrors. Sens Actuators A 120:199–210CrossRef

Title: Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors
Authors: Ghader Rezazadeh
Faraz Khatami
Ahmadali Tahmasebi
Publication date: 01-04-2007
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 7/2007
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-006-0362-1

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