Ausgabe 7/2007
Inhalt (12 Artikel)
Technical Paper
Theoretical and experimental investigation on electrochemical micromachining
Zhaoyang Zhang, Di Zhu, Ningsong Qu, Minghuan Wang
Technical Paper
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation
Yongquan Wang, Hualing Chen, Xueming He
Technical Paper
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
C. Feng, Ya-Pu Zhao, D. Q. Liu
Technical Paper
Mathematical analysis and test of an electrostatically actuated micro-power relay
S. J. Jeong, D. E. Lee, W. Wang
Technical Paper
Head–disk spacing measurement based on Michelson interferometry using white light illumination
Y. He, H. Zhang, Y. Mitsuya, K. Fukuzawa
Technical Paper
A new technology for microfluidic structures preparation based on a photoimageable ceramic
Iwona Wyżkiewicz, Natalia Lewandowska, Michał Chudy, Zbigniew Brzózka, Zbigniew Magoński, Barbara Dziurdzia, Małgorzata Jakubowska, Artur Dybko
Technical Paper
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridges
Yunqiang Li, Packirisamy Muthukumaran, Rama B. Bhat
Technical Paper
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps
A. T. Al-Halhouli, M. I. Kilani, A. Al-Salaymeh, S. Büttgenbach
Technical Paper
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
Thomas G. Hayes IV, Bharat Bhushan
Technical Paper
3D-feature-based structure design for silicon fabrication of micro devices
Yang Liu, Pingyu Jiang, Dinghong Zhang, Guanghui Zhou
Technical Paper
Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors
Ghader Rezazadeh, Faraz Khatami, Ahmadali Tahmasebi
Technical Paper
Eutectic bonding of Al-based high aspect ratio microscale structures
Fanghua Mei, J. Jiang, W. J. Meng