A new technology for microfluidic structures preparation based on a photoimageable ceramic

A new method for fabrication of hybrid ceramic-polymer structures with diversified geometry of microchannel was elaborated. This method is universal, non-complicated, and utilises commercially available materials and basic equipment for thick film technology and photolithography. A microchip for capillary electrophoresis was prepared as an example of microfluidic structure fabrication. The chip was prepared by using a photosensitive paste (dielectric FODEL 6050) which was screen printed onto a ceramic substrate, exposed through an appropriate mask, developed, fired and then glazed. In this way, we obtained the structure which can be bonded with poly(dimethylsiloxane) PDMS after oxygen plasma treatment. The application of transparent PDMS as a seal of the microchannel enabled the optical detection.