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Journal of Materials Science: Materials in Electronics
Published in: Journal of Materials Science: Materials in Electronics 1/2016

30-09-2015

Lithium cobalt oxide crystallization on flexible polyimide substrate

Authors: J. F. Ribeiro, R. Sousa, E. M. F. Vieira, A. G. Rolo, M. M. Silva, L. Dupont, J. H. Correia, L. M. Goncalves

Published in: Journal of Materials Science: Materials in Electronics | Issue 1/2016

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Abstract

This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton® substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton® and silicon substrates were compared.
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Metadata
Title
Lithium cobalt oxide crystallization on flexible polyimide substrate
Authors
J. F. Ribeiro
R. Sousa
E. M. F. Vieira
A. G. Rolo
M. M. Silva
L. Dupont
J. H. Correia
L. M. Goncalves
Publication date
30-09-2015
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 1/2016
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-015-3798-1

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