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Fundamentals of Sputtering Read chapter Read first chapter

1984 | OriginalPaper | Chapter

LTE Quantification of SIMS of Ni-Cr Alloy

Authors : S. Tamaki, H. Matsuda

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Included in: Professional Book Archive

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The quantitative correction of secondary ion intensities to elemental concentrations utilizing the Saha-Eggert equation was tried with a calibration sample of Ni-Cr alloy containing Ti , Fe, Cu and Zr. Some simplifications and improvements in the procedure as well as searches for bombarding conditions were made to get higher accuracy, and the relative deviation in concentration could be smaller than 20% for all constituent elements.

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Metadata
Title
LTE Quantification of SIMS of Ni-Cr Alloy
Authors
S. Tamaki
H. Matsuda
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
Book
Secondary Ion Mass Spectrometry SIMS IV

Print ISBN: 978-3-642-82258-2

Electronic ISBN: 978-3-642-82256-8

Copyright Year: 1984

DOI
https://doi.org/10.1007/978-3-642-82256-8_25