Simplified IMISR Method with Computer Data Acquisition

The calibrational methods for SIMS use external (MISR(1, 2)) or internal (SAA (3, 4)) standards. The IMISR (Implantation Modificated Matrix Ion Species Ratio) method proposed by us (5) is a combination of these approaches and allows the quantification depth profiles of inhomogeneous samples. Using computer data processing the IMISR quantification can now be performed in five simple steps: 1. implantation of a “standard”, 2. depth profiling of the unknown, 3. depth profiling of the “standard” samples, 4. calibration, 5. (computer) data evaluation.