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Published in:
1984 | OriginalPaper | Chapter
Relative Sensitivity Factor of Compound Semiconductor by SIMS
Authors : K. Kusao, K. Tsukamoto, Y. Yoshioka, F. Konishi
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The relative sensitivity factor (RSF) is generally used for quantitative analysis of elements by SIMS CID. Usually, the RSF has been discussed in connection with trace elements in standard samples. The RSF of major components has been seldom studied. In this paper, we consider the RSF in relation to the major components, namely, croup III and group V elements in the III-V semiconductors, where characteristics such as ionicity of the compound semiconductor are relatively well known.