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Published in:
1984 | OriginalPaper | Chapter
Quantitative Ion Probe Analysis of Oxidized Surface Using N 2 + Primary Ions
Authors : J. Murayama, N. Usuki, N. Fujino
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The Ion Microprobe Mass Analyser (IMMA) has been widely used for surface and high sensitivity analysis of various materials. For quantitative analysis of homogeneous materials, the calibration curve method is effective using reference samples [1][2]. On the other hand, quantitative methods for surface oxide layers have not been established, because the existence of oxygen significantly enhances secondary ion intensities [1]. In addition available reference samples can not be obtained.