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Measurement Techniques

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01-08-2012 | NANOMETROLOGY

Measurement of the linear dimensions of nanorelief elements with a trapezoidal profile by defocusing the electron beam of a scanning electron microscope

Authors: V. P. Gavrilenko, A. Yu. Kuzin, Yu. V. Larionov, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

Published in: Measurement Techniques | Issue 5/2012

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Abstract

It is shown experimentally that it is possible to use a method of measuring the geometrical dimensions of nanorelief elements, based on defocusing of the electron beam of a scanning electron microscope, in order to measure the upper base of a trapezoidal protuberance with a width close to the beam diameter.

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M. N. Filippov et al., Proc. SPIE, 7521, 752116-1 (2010).

GOST R 8.631-2007, Measuring Electron Scanning Microscopes. Checking Procedure.

M. A. Danilova et al., “A test object with a line width of less than 10 nm for scanning electron microscopy,” Izmer. Tekhn., No. 8, 20–23 (2008); Measur. Techn., 51, No. 8, 839–843 (2008).CrossRef

V. P. Gavrilenko et al., Measur. Sci. Technol., 20, 084022-1 (2009).ADSCrossRef

K. A. Valiev et al., “Measurement of the linear dimensions of silicon nanorelief elements with a profile close to rectangular by the scanning electron microscope electron beam defocusing method,” Mikroelektronika, 39, No. 6, 420–425 (2010).

Title: Measurement of the linear dimensions of nanorelief elements with a trapezoidal profile by defocusing the electron beam of a scanning electron microscope
Authors: V. P. Gavrilenko
A. Yu. Kuzin
Yu. V. Larionov
V. B. Mityukhlyaev
A. V. Rakov
P. A. Todua
M. N. Filippov
Publication date: 01-08-2012
Publisher: Springer US
Published in: Measurement Techniques / Issue 5/2012
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI: https://doi.org/10.1007/s11018-012-9991-1

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