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Semiconductors
Published in: Semiconductors 2/2006

01-02-2006 | Semiconductor Structures, Interfaces, and Surfaces

Methods for the doping of silicon layers in growth by sublimation MBE

Authors: V. G. Shengurov, S. P. Svetlov, V. Yu. Chalkov, D. V. Shengurov, S. A. Denisov

Published in: Semiconductors | Issue 2/2006

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Metadata
Title
Methods for the doping of silicon layers in growth by sublimation MBE
Authors
V. G. Shengurov
S. P. Svetlov
V. Yu. Chalkov
D. V. Shengurov
S. A. Denisov
Publication date
01-02-2006
Publisher
Nauka/Interperiodica
Published in
Semiconductors / Issue 2/2006
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S106378260602014X

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