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2006 | OriginalPaper | Chapter
Microstructures Under Electrostatic Loads: Discrete System Modelling
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Due to a scaling effect, electrostatic forces, usually negligible at macro-scale, become relevant at micro-scale. It follows that electrostatic actuation is used very often for microsystems. The evaluation of the mechanical behavior of microstructures under electrostatic forces requires a new approach based on a so-called coupled field analysis; in fact, due to electrostatic forces structure exhibits a deformation that generally influences the electrical field and therefore again the electrostatic forces themselves. The case of a single degree of freedom electromechanical system was first considered; as generally the case of continuum structure is developed by referring to a FEM discretisation, the more general case of a multi degrees of freedom system was then considered.