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Measurement Techniques
Published in: Measurement Techniques 5/2012

01-08-2012

Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures

Authors: A. G. Andreev, S. N. Grigoriev, E. V. Romash, S. V. Bushuev, P. S. Ignatiev, A. V. Loparev, K. V. Indukaev, P. A. Osipov

Published in: Measurement Techniques | Issue 5/2012

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Abstract

A new version of a modulation interference microscope with long-path coordinate table resting on aeromagnetic guides that enables travel of the microscope with deviation from linearity of at most 0.1 μm on path lengths up to 300 mm has been developed. The metrological aspects of the use of the microscope for measurement of the linear dimensions of nanostructures are considered. Results of measurements of the basic parameters of the topology of integrated circuits are presented.
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Literature
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S. N. Grigoriev et al., “Determining the effective fractal dimension of nanodimensional coatings with the aid of magnetic field,” Techn. Phys. Lett., 37, No. 12, 1176–1178 (2011).CrossRef
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Metadata
Title
Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures
Authors
A. G. Andreev
S. N. Grigoriev
E. V. Romash
S. V. Bushuev
P. S. Ignatiev
A. V. Loparev
K. V. Indukaev
P. A. Osipov
Publication date
01-08-2012
Publisher
Springer US
Published in
Measurement Techniques / Issue 5/2012
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-012-9996-9

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