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Microsystem Technologies

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22-03-2018 | Technical Paper

Optimization of a MEMS variable capacitor with high linearity and large tuning ratio

Authors: Zhuhao Gong, Huiliang Liu, Xin Guo, Zewen Liu

Published in: Microsystem Technologies | Issue 7/2018

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Abstract

A novel micro-electro-mechanical system variable capacitor with a nonplanar top plate and a side leverage electrode structure is proposed to achieve a large tuning ratio and excellent linearity. A theoretical analysis of the structure is performed, including both a mechanical analysis and an electrical analysis. The effects of the structural parameters on the linearity were analyzed and a design method was derived to optimize the linearity. A simulation using CoventorWare was carried out to verify the capacitor performance with particular emphasis on the capacitance versus voltage (C–V) response. The results show a high linearity factor of 99.92% between 0.077 and 0.238 pF (the linear C–V response range) that corresponds to a linear capacitance tuning ratio of 309%.

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Title: Optimization of a MEMS variable capacitor with high linearity and large tuning ratio
Authors: Zhuhao Gong
Huiliang Liu
Xin Guo
Zewen Liu
Publication date: 22-03-2018
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 7/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-018-3844-z

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