Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Microsystem Technologies
Published in: Microsystem Technologies 8/2017

26-09-2016 | Technical Paper

Research on the frequency stability of a bonded QCM for dew point measurement

Authors: Ningning Lin, Jing Nie, Xiaofeng Meng

Published in: Microsystem Technologies | Issue 8/2017

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

A bonded structure of quartz crystal microbalance (QCM) based on finite element method to measure dew point is proposed. Adhesive joints of QCM have dominating impacts on QCM’s stability in a constant environment which is one of crucial problems in designing dew point sensors. Our main purpose is to seek an optimum bonding plan for keeping the frequency stability of dew point sensor. Considering that the QCM mass sensitivity distribution along the surface of the bonded QCM follows a Gaussian-type function, we use R-square as a standard to compare the frequency stability of the structure by changing material and dimension parameters of adhesive joints with the help of APDL language in ANSYS 15.0. At last, four QCMs bonding with various lengths of adhesive joints (L) are chosen for testing time and temperature drift, and the QCM with L less than 2 mm had better frequency stability revealed by partly simulation results.
previous article An EWOD-based micro diluter with high flexibility on dilution ratio
next article Characterization of the micro injection-compression molding process for the replication of high aspect ratio micro-structured surfaces

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Literature
Bai Q, Huang X (2016) Using quartz crystal microbalance for field measurement of liquid viscosities. J Sens 2016. Article ID 7580483, p 8
Bottom VE (1982) Introduction to quartz crystal unit design. Van Nostrand Reinhold, New York
Dennis JO, Rabih AAS, Md Khir MH et al (2016) Modeling and finite element analysis simulation of MEMS based acetone vapor sensor for noninvasive screening of diabetes. J Sens. Article ID 9563938, p 14
Feng GP (2008) Resonant sensor theory and devices. Qinghua University Press, Beijing
Gehin C, Samper S, Teisseyre Y (1997) Mounting characterization of a piezoelectric resonator using FEM. In: Frequency control symposium, 1997. Proceedings of the 1997 IEEE international. IEEE, pp 630–633
Jiang HF, Zhang PR (2007) Optimal design of electrode size of QCM based on finite element analysis. Chin J Sens Actuators. 20(10):2182–2186
Josse F, Lee Y, Martin SJ, Cernosek RW (1998) Analysis of the radial dependence of mass sensitivity for modified-electrode quartz crystal resonators. Anal Chem 70(2):237–247CrossRef
Lee PY, Guo X (1991) Acceleration sensitivity of crystal resonators affected by the mass and location of electrodes. IEEE Trans Ultrason Ferroelectr Freq Control 38(4):358–365CrossRef
Lu F, Lee HP, Lu P et al (2005) Finite element analysis of interference for the laterally coupled quartz crystal microbalances. Sens Actuators A 119(1):90–99CrossRef
Nie J, Meng XF (2014) Dew point and relative humidity measurement using a quartz resonant sensor. Microsyst Technol 20(7):1311–1315CrossRef
Nie J, Meng XF, Zheng R, Wang S (2013) Fast quartz resonant sensors for high humidity range 60–95% RH. Sens Actuators B 185:211–217CrossRef
Richardson A, Bhethanabotla VR, Smith AL et al (2009) Patterned electrodes for thickness shear mode quartz resonators to achieve uniform mass sensitivity distribution. IEEE Sens J 9(12):1772–1777CrossRef
Rong-Xing WU, Ji-Liang LI, Lan-Zhen YU et al (2013) Research on quartz crystal resonator with consideration of support effect. Comput Mod 1(8):92–94
Rosenbaum JF (1988) Bulk acoustic wave theory and devices. Artech House Publish, LondonMATH
Sun H, Lu P, Zhang P, Chen H (2004) Dynamic analysis of AT-cut quartz resonators with ANSYS. Sensors, 2004. In: Proceedings of IEEE, pp 95–98
Yang Y, Meng X, Wang Q (2015) Optimization of dew point sensitive structure based on a quartz resonant sensor. In: The 2015 4th international conference on information technology and management innovation (ICITMI2015), pp 1919–1922
Metadata
Title
Research on the frequency stability of a bonded QCM for dew point measurement
Authors
Ningning Lin
Jing Nie
Xiaofeng Meng
Publication date
26-09-2016
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2017
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3145-3

Other articles of this Issue 8/2017

Microsystem Technologies 8/2017 Go to the issue

Technical Paper

Glass based IDC sensor element for flex loads on MLCCs in PCB manufacturing chain

Technical Paper

AC magnetohydrodynamic slip flow in microchannel with sinusoidal roughness

Technical Paper

Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators

Technical Paper

Effect of microfabrication defects on the performance of rarefaction gas-lubricated micro flexure pivot tilting pad gas bearing in power MEMS

Technical Paper

Inkjet-printed antenna on thin PET substrate for dual band Wi-Fi communications

Technical Paper

Characterization of the micro injection-compression molding process for the replication of high aspect ratio micro-structured surfaces