1984 | OriginalPaper | Chapter
SIMS at Higher Energies
Authors : A. E. Litherland, J. C. Rucklidge, G. C. Wilson, W. E. Kieser, L. R. Kilius, R. P. Beukens
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The IsoTrace (Isotope and Rare Atom Counting Equipment) facility is based on a small tandem electrostatic accelerator (General Ionex Corporation 3 MV Tandetron). When fully commissioned the laboratory will offer a wide range of analytical strategies for SIMS at higher energy. Three ion sources are currently being tested. Two of these employ wide ( 0.25–1.0 mm), high current (tens of μA) beams of Cs+ or I- for ultrasensitive (sub-ppb) analysis of bulk samples and the third, when adapted to sputtering mode in 1984, will be part of an ion microprobe attachment for ppm-ppb trace element and isotopic work.