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1984 | OriginalPaper | Buchkapitel

SIMS at Higher Energies

verfasst von : A. E. Litherland, J. C. Rucklidge, G. C. Wilson, W. E. Kieser, L. R. Kilius, R. P. Beukens

Erschienen in: Secondary Ion Mass Spectrometry SIMS IV

Verlag: Springer Berlin Heidelberg

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The IsoTrace (Isotope and Rare Atom Counting Equipment) facility is based on a small tandem electrostatic accelerator (General Ionex Corporation 3 MV Tandetron). When fully commissioned the laboratory will offer a wide range of analytical strategies for SIMS at higher energy. Three ion sources are currently being tested. Two of these employ wide ( 0.25–1.0 mm), high current (tens of μA) beams of Cs+ or I- for ultrasensitive (sub-ppb) analysis of bulk samples and the third, when adapted to sputtering mode in 1984, will be part of an ion microprobe attachment for ppm-ppb trace element and isotopic work.

Metadaten
Titel
SIMS at Higher Energies
verfasst von
A. E. Litherland
J. C. Rucklidge
G. C. Wilson
W. E. Kieser
L. R. Kilius
R. P. Beukens
Copyright-Jahr
1984
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-82256-8_48

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