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Published in:
Fundamentals of Sputtering Read chapter Read first chapter

1984 | OriginalPaper | Chapter

SIMS Combined with Other Methods of Surface Analysis

Author : Otto Ganschow

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Included in: Professional Book Archive

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Like all methods of surface analysis, SIMS provides only fragmentary information and therefore profits by combination with complementary techniques. Comparable results can only be obtained if these additional methods are applied to the same surface simultaneously or sequentially in one UHV system.

previous chapter A Low-Energy SIMS Investigation on Thermal Diffusion on Vapor-Deposited Nickel on Copper Substrate
next chapter Combined SIMS and Electron Spectroscopy Investigation of the Chemical State of Some Ion-Implanted Transition Metals and Steels
Metadata
Title
SIMS Combined with Other Methods of Surface Analysis
Author
Otto Ganschow
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
Book
Secondary Ion Mass Spectrometry SIMS IV

Print ISBN: 978-3-642-82258-2

Electronic ISBN: 978-3-642-82256-8

Copyright Year: 1984

DOI
https://doi.org/10.1007/978-3-642-82256-8_58