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Semiconductors
Published in: Semiconductors 1/2007

01-01-2007 | Semiconductor Structures, Interfaces, and Surfaces

Specific features of molecules’ pyrolysis on the epitaxial surface in the case of growth of the Si1 − x Ge x layers from hydrides in vacuum

Authors: L. K. Orlov, S. V. Ivin

Published in: Semiconductors | Issue 1/2007

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Metadata
Title
Specific features of molecules’ pyrolysis on the epitaxial surface in the case of growth of the Si1 − x Ge x layers from hydrides in vacuum
Authors
L. K. Orlov
S. V. Ivin
Publication date
01-01-2007
Publisher
Nauka/Interperiodica
Published in
Semiconductors / Issue 1/2007
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S1063782607010137

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