Sputtered Atom Yields and Ionization Probabilities of Binary Alloys Under O 2 + Bombardment

It is well known that oxygen primary ion beam enhances and stabilizes the yield of the secondary sample ions. But the role of oxygen ion in the process of secondary ion emission is not yet fully understood. In a previous paper(1) the authors reported the surface structure, sputtered atom yields and secondary ion mass spectra of pure metals under 0₂+bombardment. The authors have now extended this study to series Cr-Fe,Mn-Fe, Mn-Co,Fe-Co,Fe-Ni,Co-Ni and Ni-Cu binary alloys. Accumulation of these fundamental data is indispensable for elucidating the effect of oxygen ion on sputtering and establishing the method of quantitative interpretation of mass spectra.