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Microsystem Technologies

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01-11-2012 | Technical Paper

SU-8-based rapid tooling for thermal roll embossing

Authors: Khaled Metwally, Laurent Robert, Roland Salut, Chantal Khan-Malek

Published in: Microsystem Technologies | Issue 11/2012

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Abstract

Rapid, flexible and low-cost tooling is particularly required in replication processes especially with small and medium volume as in research labs or startups. Epoxy stamps have been used in hot embossing and injection moulding since a few years. In this work, SU-8 epoxy-based patterns were generated on silicon wafers, which were employed as stamps in hot roll embossing of cyclic-olefin-copolymer and poly-methyl-methacrylate foils using a commercial laminator. This method combines the accuracy of lithographic patterning of SU-8 resist with the mass production capability of roll embossing. The stamp fabrication process can be performed in less than a few hours using photolithography for ten to hundred micrometers feature size and electron beam lithography for the sub-micronic range.

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Title: SU-8-based rapid tooling for thermal roll embossing
Authors: Khaled Metwally
Laurent Robert
Roland Salut
Chantal Khan-Malek
Publication date: 01-11-2012
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 11/2012
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-012-1534-9

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