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Microsystem Technologies
Erschienen in: Microsystem Technologies 11/2012

01.11.2012 | Technical Paper

SU-8-based rapid tooling for thermal roll embossing

verfasst von: Khaled Metwally, Laurent Robert, Roland Salut, Chantal Khan-Malek

Erschienen in: Microsystem Technologies | Ausgabe 11/2012

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Abstract

Rapid, flexible and low-cost tooling is particularly required in replication processes especially with small and medium volume as in research labs or startups. Epoxy stamps have been used in hot embossing and injection moulding since a few years. In this work, SU-8 epoxy-based patterns were generated on silicon wafers, which were employed as stamps in hot roll embossing of cyclic-olefin-copolymer and poly-methyl-methacrylate foils using a commercial laminator. This method combines the accuracy of lithographic patterning of SU-8 resist with the mass production capability of roll embossing. The stamp fabrication process can be performed in less than a few hours using photolithography for ten to hundred micrometers feature size and electron beam lithography for the sub-micronic range.
Vorheriger Artikel Hot embossing of thermoplastic multilayered stacks
Nächster Artikel Polymer-based fabrication techniques for enclosed microchannels in biomedical applications

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Metadaten
Titel
SU-8-based rapid tooling for thermal roll embossing
verfasst von
Khaled Metwally
Laurent Robert
Roland Salut
Chantal Khan-Malek
Publikationsdatum
01.11.2012
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 11/2012
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1534-9

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