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Microsystem Technologies
Published in: Microsystem Technologies 8/2009

01-08-2009 | Technical Paper

Sub-μm structured lotus surfaces manufacturing

Authors: Matthias Worgull, M. Heckele, T. Mappes, B. Matthis, G. Tosello, T. Metz, J. Gavillet, P. Koltay, H. N. Hansen

Published in: Microsystem Technologies | Issue 8/2009

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Abstract

Sub-μm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-μm structures with minimum lateral feature size of 400 nm and up to 4 μm high.
previous article A micro roller embossing process for structuring large-area substrates of laminated ceramic green tapes

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Literature
Johnson RE, Dettre RH (1964) Contact angle hysteresis. I. Study of an idealized rough surface. Adv Chem Ser 43:112CrossRef
Tsibouklis J et al (2000) Poly(perfluoroalkyl methacrylate) film structures: surface organization phenomena, surface energy determinations, and force of adhesion measurements. Macromolecules 33(22):8460–8465. doi:10.​1021/​ma0008185 CrossRef
Worgull M, Hetu J-F, Kabanemi KK, Heckele M (2006) Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication. J Microlith Microfab Microsyst 5(1)
Metadata
Title
Sub-μm structured lotus surfaces manufacturing
Authors
Matthias Worgull
M. Heckele
T. Mappes
B. Matthis
G. Tosello
T. Metz
J. Gavillet
P. Koltay
H. N. Hansen
Publication date
01-08-2009
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 8/2009
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-008-0744-7

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