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Fundamentals of Sputtering Read chapter Read first chapter

1984 | OriginalPaper | Chapter

Surface Structure of Oxidized Metals Bombarded by Incident Ions

Authors : Y. Sekimoto, Y. Igarashi, T. Kawata

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Included in: Professional Book Archive

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On the metal surface bombarded by incident ions, there is recognized the irregular pattern by TSUNOYAMA (1), that is called a cone. The cone affects inexplicably on the precision of ion mass spectrometry. However, the mechanism of cone growth is not well revealed. To clarify this, the experiment using 42%Ni-Fe alloy has been carried out in the ion mass analyzer.

previous chapter Secondary Ion Emission from Si Subjected to Oxygen Ion Bombardment
next chapter The Effect of Energetic Electrons on the Secondary Ion Emission
Metadata
Title
Surface Structure of Oxidized Metals Bombarded by Incident Ions
Authors
Y. Sekimoto
Y. Igarashi
T. Kawata
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
Book
Secondary Ion Mass Spectrometry SIMS IV

Print ISBN: 978-3-642-82258-2

Electronic ISBN: 978-3-642-82256-8

Copyright Year: 1984

DOI
https://doi.org/10.1007/978-3-642-82256-8_10