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Microsystem Technologies
Published in: Microsystem Technologies 4/2016

15-02-2015 | Technical Paper

Symmetrical design in piezoresistive sensing for micromechanical resonator

Authors: Wenshan Wei, Weilong You, Chuanguo Dou, Xiaofei Wang, Heng Yang

Published in: Microsystem Technologies | Issue 4/2016

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Abstract

A central symmetrical design in double ended tuning fork (DETF) resonator is demonstrated to remove the high feedthrough signal. The equivalent electrical simulation model for piezoresistive sensing is first built to illustrate that the location arrangement of connection pads plays a decisive role in the response of the high frequency resonators. Both of the symmetrical design and asymmetrical design of the DETF that resonating at 3.1 MHz are fabricated and tested to verifiy that with the same dimension of the resonator structrue, the symmetrical design can help to cancel the feedthrough signal from the output of the wheastone bridge.
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Literature
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Van Beek J et al (2007) Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator. In: Electron Devices Meeting, 2007, IEDM 2007, IEEE International. IEEE, pp 411–414
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Wai-Chi W, Azid A, Majlis B (2010) Formulation of stiffness constant and effective mass for a folded beam. Arch Mech 62:405–418MATH
Wei X, Seshia AA (2013) Differential piezoresistive sensing in a bulk-mode micromechanical resonator. Micro Nano Lett IET 8:107–110
Wei W, You W, Zhao W, Yu Z, Pang J, Yang H (2014) A novel approach for MEMS with galvanic protection on SOI wafer. Microsyst Technol 1–7
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Metadata
Title
Symmetrical design in piezoresistive sensing for micromechanical resonator
Authors
Wenshan Wei
Weilong You
Chuanguo Dou
Xiaofei Wang
Heng Yang
Publication date
15-02-2015
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2461-3

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