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Microsystem Technologies

Ausgabe 4/2016

Inhalt (26 Artikel)

Technical Paper

Diagnosis and optimization of a power distribution network by extracting its parasitic inductances and building a lumped circuit model

Jie Pan, Xindong Yu, Huijuan Wang, Tianmin Du, Daniel Guidotti, Yuan Lu, Daquan Yu

Technical Paper

Fast fabrication of microfluidic devices using a low-cost prototyping method

Lei Wang, Wenfang Liu, Shuang Li, Tingting Liu, Xingxing Yan, Yuye Shi, Zeneng Cheng, Chuanpin Chen

Technical Paper

MEMS-based monolithic three-axis fiber-optic acceleration sensor

Xiaowei Wang, Shaolong Zhong, Jing Xu, Yaming Wu

Technical Paper

Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method

Jingzhi He, Zhifu Yin, Chao Li, Wenqiang Wang, Helin Zou

Technical Paper

Robust controller design of SGCMG driven by hollow USM

Song Pan, Jian-Hui Zhang, Wei-Qing Huang

Technical Paper

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

Chun Hu, Dezhi Zheng, Shangchun Fan, Remco John Wiegerink, Guo Zhanshe

Technical Paper

A new analytical model of single-stage microleverage mechanism in resonant accelerometer

Hong Ding, Jiuxuan Zhao, Bing-Feng Ju, Jin Xie

Technical Paper

Electromechanical modeling and simulation by the Euler–Lagrange method of a MEMS inertial sensor using a FGMOS as a transducer

G. Stephany Abarca-Jiménez, M. Alfredo Reyes-Barranca, Salvador Mendoza-Acevedo, Jacobo E. Munguía-Cervantes, Miguel A. Alemán-Arce

Technical Paper

Microscale material characterization and viscoelastic modeling of organic dielectic thin film in eWLB package

Katrin Unterhofer, Harald Preu, Jürgen Walter, Holger Döpke

Technical Paper

Symmetrical design in piezoresistive sensing for micromechanical resonator

Wenshan Wei, Weilong You, Chuanguo Dou, Xiaofei Wang, Heng Yang

Technical Paper

Tunable MEMS piezoelectric energy harvesting device

Almudena Rivadeneyra, Juan Manuel Soto-Rueda, Rosemary O’Keeffe, Jesús Banqueri, Nathan Jackson, Alan Mathewson, Juan A. López-Villanueva

Technical Paper

Rate-bias-dependent hysteresis modeling of a magnetostrictive transducer

Omar Aljanaideh, Mohammad D. AL-Tahat, Mohammad Al Janaideh

Technical Paper

2-Dimensional vibration model of MEMS cantilever beams with step-up anchors

Kaiyue Wang, Xiaoping Liao, Zhiqiang Zhang

Technical Paper

Au decorated ZnO thin film: application to DNA sensing

K. L. Foo, U. Hashim, C. H. Voon, Mohammad Kashif, Md. Eaqub Ali

Technical Paper

Electrostatically actuated MEMS relay arrays for high-power applications

Bo Ma, Zheng You, Yong Ruan, Shuangkai Chang, Gaofei Zhang

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