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Journal of Materials Science: Materials in Electronics
Published in: Journal of Materials Science: Materials in Electronics 15/2017

11-04-2017

Synthesis and characterization of vanadium oxide thin films on different substrates

Authors: Osman Pakma, Cihat Özaydın, Şadan Özden, I. Afşin Kariper, Ömer Güllü

Published in: Journal of Materials Science: Materials in Electronics | Issue 15/2017

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Abstract

In this study, the V8O15 derivative of vanadium oxide was produced on plain glass, indium tin oxide and silicon wafer substrate layers by taking advantage of wet chemical synthesis which is an easy and economical method. The structural properties of the produced films were examined by XRD and SEM analyses. Besides, Al/VOx/p-Si metal-oxide-semiconductor (MOS) structure was obtained by the same synthesis method. Doping densities of these MOS structures were calculated from frequency dependent capacitance–voltage measurements. It was determined that the interface states which were assigned with the help of these parameters vary according to frequency.
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Metadata
Title
Synthesis and characterization of vanadium oxide thin films on different substrates
Authors
Osman Pakma
Cihat Özaydın
Şadan Özden
I. Afşin Kariper
Ömer Güllü
Publication date
11-04-2017
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 15/2017
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-017-6870-1

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