Top

Microsystem Technologies

Published in:

11-01-2018 | Technical Paper

Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators

Authors: Zhuo Zhang, Yueqing Yu, Xuping Zhang

Published in: Microsystem Technologies | Issue 7/2018

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

This paper presents a comprehensive modal analysis of Z-shaped beam electrothermal microactuators for the first time. Both longitudinal and lateral vibrations are taken into account to obtain the vibration equations of the unique geometric feature: a Z-shaped beam with a shuttle in the middle. The natural frequencies and the associated mode shapes of the Z-shaped beams are calculated based on the vibration equations subjected to both boundary and continuity conditions. Finite element simulations are performed using ANSYS software to verify the analytically calculated natural frequencies and mode shapes of the Z-shaped beams. Based on the modal analysis, this paper also investigates the relationship between the natural frequencies and volume scale of the Z-shaped beam electrothermal microactuators. In addition, comprehensive parameter analysis is conducted to provide insights and guidance on designing and optimization of the Z-shaped beam electrothermal microactuators.

previous article Residual stress release for SU-8 structures by water assist ultrasonic

next article Piezoresistif microsensors for an instrumented medical needle for its real time monitoring in a microlocalization tool

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Ali A, Azim RA, Khan US, Syed AA, lzhar U (2012) Design, simulation and optimization of electrothermal micro actuator. Appl Mech Mater 229–231:1939–1943CrossRef

Baracu A, Voicu R, Muller R, Avram A, Pustan M, Chiorean R, Birleanu C, Dudescu C (2014) Design and fabrication of a MEMS chevron-type thermal actuator. In: International conferences and exhibition on nanotechnologies and organic electronics, Thessaloniki, Greece

Burnie M (2010) Modal analysis of MEMS gyroscopic sensors. Master, Queen’s University, Kingston, Ontario, Canada

Chen W, Huang S (2009) Design and fabrication of topologically optimal miniature microgripper integrated with an electro-thermal microactuator. J Eng Tech Edu 6(2):166–181

Chen W, Yeh P, Hu C, Fang W (2008) Design and characterization of single-layer step-bridge structure for out-of-plane thermal actuator. Microelectromech Syst 17:70–77CrossRef

Chu J, Zhang R, Chen Z (2011) A novel SU-8 electrothermal microgripper based on the type synthesis of the kinematic chain method and the stiffness matrix method. J Micromech Microeng 21:054030CrossRef

Enikov ET, Kedar SS, Lazarov KV (2005) Analytical model for analysis and design of V-shaped thermal microactuator. J Microelectromech Syst 14(4):788–798CrossRef

Fowler A, Rakotondrabe M, Moheimani S (2013) Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation. In: The sixth IFAC symposium on mechatronic systems, Hangzhou, China

Guan C, Zhu Y (2010) An electrothermal microactuator with Z-shaped beams. J Micromech Microeng 20:085014CrossRef

Gupta S, Pahwa T, Narwal R, Prasad B, Kumar D (2012) Optimizing the performance of MEMS electrostatic comb drive actuator with different flexure springs. In: Proceedings of the 2012 COMSOL conference, Bangalore, India

Hussein H, Tahhan A, Moal PL, Bourbon G, Haddab Y, Lutz P (2016) Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator. J. Micromech. Microeng. 26:025010CrossRef

Kim Y-S, Dagalakis NG, Gupta SK (2014) Design of MEMS based three-axis motion stage by incorporating a nested structure. J Micromech Microeng 24:075009CrossRef

Kumar V, Sharma NN (2014) Design and validation of silicon-on-insulator based U shaped thermal microactuator. Int J Mater Mech Manuf 2(1):86–91MathSciNet

Kwan AMH, Song S, Lu X, Lu L, Teh Y, Teh Y, Chong EWC, Gao Y, Hau W, Zeng F, Wong M, Huang C, Taniyama A, Makino Y, Nishino S, Tsuchiya T, Tabata O (2012) Improved designs for an electrothermal in-plane microactuator. J Microelectromech Syst 21(3):586–595CrossRef

Li L, Uttamchandani D (2009) Dynamic response modelling and characterization of a vertical electrothermal actuator. J Micromech Microeng 19:075014CrossRef

Li X, Lang L, Liu J, Xia Y, Yin L, Hu J B, Fang D, Zhang H (2010) Electro-thermally actuated RF MEMS switch for wireless communication. In: Proceedings of the 2010 5th IEEE international conference on nano/micro engineered and molecular systems, Xiamen, China

Mayyas M (2012) Comprehensive thermal modeling of electrothermoelastic microstructures. Actuators 1:21–35CrossRef

Merced E, Tan X, Sepulveda N (2014) Closed-loop tracking of large displacements in electro-thermally actuated VO₂-based MEMS. J Microelectromech Syst 23(5):1073–1083CrossRef

Molhave K, Hansen O (2005) Electro-thermally actuated microgrippers with integrated force-feedback. J Micromech Microeng 15:1265–1270CrossRef

Moussa REK, Grossard M, Mehdi B, Arnaud H, Chaillet N (2014) Modeling and control of a piezoelectric microactuator with proprioceptive sensing capabilities. Measurement 24(6):590–604

Ouyang J, McDonald M, Zhu Y (2013) Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon. J Micromech. Microeng 23:125036CrossRef

Pawinanto R E, Yunas J, Majlis B Y, Hamzah A A (2013) Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. In: 2013 IEEE regional symposium on micro and nanoelectronics, Langkawi, Malaysia

Sahu B, Taylor CR, Leang KK (2010) Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation. J Manuf Sci Eng 132:030917CrossRef

Soma A, Iamoni S, Voicu R, Muller R (2014) Design and building-up of an electro-thermally actuated cell microgripper. In: Proceedings of the 2014 international conference on theoretical mechanics and applied mechanics & proceedings of the 2014 international conference on mechanical engineering, Venice, Italy

Stokey W F (2002) Vibration of systems having distributed mass and elasticity. In: Harris’ shock and vibration handbook, 5th ed. McGraw-Hill, New York

Venditti R, Lee JSH, Sun Y, Li D (2006) An in-plane, bi-directional electrothermal MEMS actuator. J Micromech Microeng 16:2067–2070CrossRef

Vij R, Singh B, Jain DK (2014) Design and analysis of electro thermally actuated microgripper. IOSR J VLSI Signal Process 4(4):46–51CrossRef

Wu C, Hsu W (2006) Design and fabrication of an electrothermal microactuator for multi-level conveying. Microsyst Technol 12:293–298CrossRef

Yan D, Khajepour A, Mansour R (2004) Design and modeling of a MEMS bidirectional vertical thermal actuator. J Micromech Microeng 14:841–850CrossRef

Zhang Z, Yu Y, Liu X, Zhang X (2015) A Comparison model of V- and Z-shaped electrothermal microactuators. In: Proceedings of 2015 IEEE international conference on mechatronics and automation, Beijing, China

Zhang Z, Zhang W, Wu Q, Yu Y, Liu X, Zhang X (2015) A comprehensive analytical model and experimental validation of Z-shaped electrothermal microactuators. In: The 3rd IFToMM symposium on mechanism design for robotics, Aalborg, Denmark

Zhang Z, Yu Y, Liu X, Zhang X (2016) Dynamic electro-thermal modeling of V- and Z-shaped electrothermal microactuator. In: Proceedings of 2016 IEEE international conference on mechatronics and automation, Harbin, China

Zhang Z, Yu Y, Liu X, Zhang X (2017a) Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators. Microsyst Technol 23(8):3775–3789CrossRef

Zhang Z, Zhang W, Wu Q, Yu Y, Liu X, Zhang X (2017b) Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators. Micromech Microeng 27:015023CrossRef

Zhu Y, Bazaei A, Moheimani SOR, Yuce MR (2011) Design, modeling and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing. J Microelectromech Syst 20:711–719CrossRef

Zhu Y, Moheimani SOR, Yuce MR (2012) Bidirectional electrothermal actuator with Z-shaped beams. Microelectromech Syst 12(7):2508–2509

Title: Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators
Authors: Zhuo Zhang
Yueqing Yu
Xuping Zhang
Publication date: 11-01-2018
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 7/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-018-3709-5

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 7/2018

MEMS based energy harvesting for the Internet of Things: a survey

Wave dispersion characteristics of orthotropic double-nanoplate-system subjected to a longitudinal magnetic field

A first principle approach toward circuit level modeling of electrically doped gated diode from single wall thymine nanotube-like structure

Investigation of free vibration response of smart sandwich micro-beam on Winkler–Pasternak substrate exposed to multi physical fields

Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment

Effects of the ‘spring structure’ on the performance of a vibrating plate of the piezoelectric inkjet print-head