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Microsystem Technologies
Published in: Microsystem Technologies 8/2019

10-10-2018 | Technical Paper

A flexure motion stage system for light beam control

Authors: Mehdi Riza, Guangbo Hao

Published in: Microsystem Technologies | Issue 8/2019

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Abstract

This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.
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Appendix
Available only for authorised users
Literature
Awtar S (2003) Synthesis and analysis of parallel kinematic XY flexure mechanisms. Doctoral dissertation, Massachusetts Institute of Technology
Awtar S, Slocum AH, Sevincer E (2007) Characteristics of beam-based flexure modules. ASME J Mech Des 129(6):625–639CrossRef
Hao G (2017) Determinate synthesis of symmetrical, monolithic tip-tilt-piston flexure stages. ASME J Mech Des 139(4):042303CrossRef
Hao G, He X (2017) Designing a monolithic tip-tilt-piston flexure manipulator. Arch Civil Mech Eng 17(4):871–879CrossRef
Hao G, Kong X (2016) A structure design method for compliant parallel manipulators with actuation isolation. Mech Sci 7:247–257CrossRef
Hao G, Yu J, Li H (2016) A brief review on nonlinear modelling methods and applications of compliant mechanisms. Front Mech Eng 11(2):119–128CrossRef
Howell LL (2001) Compliant mechanisms. Wiley, Hoboken
Panas RM, Hopkins JB (2014) Actuator design for a high-speed large-range tip-tilt-piston micro-mirror array. In: Proceedinds of ASPE 29th meeting, Boston, MA,Nov, pp 9–14
Song Y, Panas RM, Hopkins JB (2017) A review of micromirror arrays. Precis Eng 51:729–761CrossRef
Metadata
Title
A flexure motion stage system for light beam control
Authors
Mehdi Riza
Guangbo Hao
Publication date
10-10-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4168-8

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