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Microsystem Technologies
Published in: Microsystem Technologies 8/2019

31-10-2018 | Technical Paper

Localized trio cantilevers for identifying different mass perturbations

Authors: Dong F. Wang, Di Zhou, Shuyi Liu, Jing Hong

Published in: Microsystem Technologies | Issue 8/2019

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Abstract

This paper demonstrates a method based on mode localization which, for the first time, verifies the possibility of identifying two kinds of mass perturbations with a coupled three-cantilever array theoretically, analytically and experimentally. In the light of mode shapes in certain resonance modes, the proportion of mass perturbations on the side and center cantilever can be qualitatively determined. A combination of the 1st and 3rd mode shape was selected for discriminating different situations including one single mass perturbation and mixed mass perturbations. On the one hand, the proposed method simplifies the structure of the present 15 or 5 cantilever array sensors used for mass positioning. On the other hand, it provides a simple and efficient way to the pre-warning of those multiple toxic substances in some public places.
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Literature
Baller MK, Lang HP, Fritz J, Gerber C, Gimzewsk JK, Drechsler U et al (2000) A cantilever array-based artificial nose. Ultramicroscopy 82(1–4):1–9CrossRef
Battiston FM, Ramseyer JP, Lang HP, Baller MK, Gerber C, Gimzewski JK et al (2001) A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout. Sens Actuators B Chem 77(1):122–131CrossRef
Chatani K, Wang DF, Ikehara T, Maeda R (2011) Amplitude enhancement using vibration mode localization with a single micro-mechanically coupled beam-shaped resonator array. In: Symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP), pp 339–343
Chatterjee A (2016) Sensitivity and error analysis of a coupled micro-resonator array for ultra-sensitive mass detection using matrix perturbation theory. IEEE Sens J 16(5):1304–1309CrossRef
Davis ZJ, Boisen A (2005) Aluminum nano-cantilevers for high sensitivity mass sensors. Appl Phys Lett 87(1):4469CrossRef
Ekinci KL, Huang XMH, Roukes ML (2004) Ultrasensitive nanoelectromechanical mass detection. Appl Phys Lett 84(22):4469–4471CrossRef
Ilic B, Czaplewski D, Zalalutdinov M, Craighead HG, Neuzil P, Campagnolo C et al (2001) Single cell detection with micromechanical oscillators. J Vacuum Sci Technol B Microelectron Nanometer Struct 19(6):2825–2828CrossRef
Kozuka K, Wang DF, Ikehara T, Chatani K, Maeda R (2013) Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter. In: Proceedings of the 8th IEEE international conference on nano/micro engineered and molecular systems (NEMS), pp 1198–1201
Lang HP, Berger R, Battiston F, Ramseyer JP, Meyer E, Andreoli C et al (1998) A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors. Appl Phys A 66(1):S61–S64CrossRef
Leissa AW (1974) On a curve veering aberration. Zeitschrift Für Angewandte Mathematik Und Physik Zamp 25(1):99–111CrossRefMATH
Li X, Zhou D, He J, Liu X, Wang DF (2017) Mode-localized cantilever array for picogram order mass sensing. In: Proceedings of 12th IEEE international conference on nano/micro engineered and molecular systems (NEMS), pp 587–590
Li X, Zhou D, Liu R, Liu S, Liu X, Wang DF (2017) Localization in coupled systems: part II—consideration on damping issue in a mode-localized cantilever array. In: Proceedings of symposium on IEEE on design, test, integration and packaging of MEMS/MOEMS (DTIP), pp 229–232
Spletzer M, Raman A, Wu AQ, Xu X, Reifenberger R (2006) Ultrasensitive mass sensing using mode localization in coupled microcantilevers. Appl Phys Lett 88(25):4899CrossRef
Spletzer M, Raman A, Sumali H, Sullivan JP (2008) Highly sensitive mass detection and identification using vibration localization in coupled microcantilever arrays. Appl Phys Lett 92(11):122CrossRef
Thiruvenkatanathan P, Yan J, Woodhouse J, Seshia AA (2009) Enhancing parametric sensitivity in electrically coupled mems resonators. J Microelectromech Syst 18(5):1077–1086CrossRef
Wang DF, Chatani K, Kozuka K, Ikehara T, Maeda R (2013) Analytical studies on amplitude change enhancement in coupled aluminium nitride coated single crystal silicon oscillator pair applicable to ultra-sensitive resonating microfluidic flowmeters. Micro Nano Lett 8(10):609–613CrossRef
Wang DF, Li X, Yang X, Ikehara T, Maeda R (2015) Enhancing amplitude changes by mode localization in trio cantilevers with mass perturbation. J Micromech Microeng 25(9):095017CrossRef
Zhao C, Wood GS, Xie J, Chang H, Pu SH, Kraft M (2015) A force sensor based on three weakly coupled resonators with ultrahigh sensitivity. Sens Actuators A 232:151–162CrossRef
Zhou D, Li X, He J, Liu X, Wang DF (2017) Mode-localized trio cantilever array for picogram order mass sensing. In: Proceedings of 19th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS), pp 1449–1452
Metadata
Title
Localized trio cantilevers for identifying different mass perturbations
Authors
Dong F. Wang
Di Zhou
Shuyi Liu
Jing Hong
Publication date
31-10-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4210-x

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