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Microsystem Technologies
Published in: Microsystem Technologies 2/2008

01-02-2008 | Technical Paper

Anisotropically etched silicon fibre-grippers

Authors: Roland B. Gentemann, Edgar Voges

Published in: Microsystem Technologies | Issue 2/2008

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Abstract

High precision vacuum grippers for optical fibre components are fabricated by silicon bulk micromachining. Anisotropic etching of (100) and (110) silicon wafers offers high precision and lower fabrication costs than deep reactive ion etching (D-RIE) processes. Two types of grippers are introduced: a vertical, narrow one for chips where space is limited and short fibre elements have to be assembled. For longer fibres and high angular precision a horizontal gripper with multiple gripper ledges is presented.
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Literature
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Hoffmann M, Kopka P, Voges E (2000) Bulk silicon micromachined actuators for large deflections. MICRO.tec, VDE World Microtechnologies Congress, EXPO 2000, Proceedings, vol 2, pp 663–668. Hannover, Germany
Hoffmann M, Kopka P, Nüsse D, Voges E (2003) Fibre-optical MEMS switches based on bulk silicon micromachining. Microsyst Technol 9:299–303CrossRef
Kopka P (2001) Optische Wellenleiterschaltungen und Mikrostrukturierung auf Silicium.Dissertation, University of Dortmund, Dortmund
Nüsse D, Hoffmann M, Voges E (2004) Megasonic enhanced KOH Etching for {110} silicon bulk micromachining. Optomech Sens Actuators Control Proc SPIE 5602:27–34
Petersen B (2003) Flexible Handhabungstechniken für die automatisierte Mikromontage. Dissertation, ISBN 3-8322-1815-7, pp 1-25
Metadata
Title
Anisotropically etched silicon fibre-grippers
Authors
Roland B. Gentemann
Edgar Voges
Publication date
01-02-2008
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 2/2008
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-007-0410-5

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