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Microsystem Technologies

Issue 2/2008

Content (19 Articles)

Technical Paper

Study on design of micro-stirrer for thrombus dissolution

Minoru Morita, Zhongwei Jiang, Tetsuyou Watanabe, Naoki Chijimatsu, Shoichi Kato, Michiyasu Suzuki

Technical Paper

Anisotropically etched silicon fibre-grippers

Roland B. Gentemann, Edgar Voges

Technical Note

Characterization of a novel segmented micro mirror

Hongbin Yu, Peng Wu, Yan Liu, Jun Li, Haiqing Chen

Technical Paper

Collapse-free thermal bonding technique for large area microchambers in plastic lab-on-a-chip applications

Dong Sung Kim, Hyun Sup Lee, Jungyoup Han, Se Hwan Lee, Chong H. Ahn, Tai Hun Kwon

Technical Paper

Modeling, optimization and performance of high-Q MEMS solenoid inductors

Dong-Ming Fang, Yong Zhou, Xiang-Meng Jing, Xiao-Lin Zhao, Xi-Ning Wang

Technical Note

On the mechanical strength of biocompatible semi-IPNs of polyvinyl alcohol and polyacrylamide

Shefali Mishra, R. Bajpai, R. Katare, A. K. Bajpai

Technical Paper

Effects of environmental temperature on the performance of a micromachined gyroscope

Guangjun Liu, Anlin Wang, Tao Jiang, Jiwei Jiao, Jong-Bok Jang

Technical Paper

Dynamic characteristics of micro air bearings for microsystems

Q. D. Zhang, X. C. Shan

Technical Note

Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure

Adel Nabian, Ghader Rezazadeh, Mohammadali Haddad-derafshi, Ahmadali Tahmasebi

Technical Paper

Peristaltic micropump system with piezoelectric actuators

Ling-Sheng Jang, Yung-Chiang Yu

Technical Paper

Influence of mask substrate materials on resist sidewall roughness in deep X-ray lithography

G. Aigeldinger, C.-Y. P. Yang, D. M. Skala, D. H. Morse, A. A. Talin, S. K. Griffiths, J. T. Hachman, J. T. Ceremuga