Dynamic characteristics of micro air bearings for microsystems

This paper reports on the dynamic characteristics of micro air bearings that include thrust and journal air bearings for microsystems. The dynamic thrust air bearing employs a spiral groove configuration. Analysis shows that the motion stability and load capacity of a thrust air bearing imposes a contradictive requirement on the groove pattern of the air bearing. The dynamic journal air bearing is realized by using a plain circular trench with a narrow radial clearance of C, and a very small aspect ratio of bearing length versus diameter (L/D). Analysis on the shock tolerance of the journal air bearing shows that the shock tolerance increases with the bearing number, the bearing aspect ratio of L/D and its initial equilibrium eccentricity ratio ε ₀. The optimum values of the bearing parameters are explored and recommended. A prototype of turbine device has been designed based on the recommended bearing configurations and realized via microfabrication.