Skip to main content
Top

Microsystem Technologies

Issue 9/2023

Content (10 Articles)

Review Paper

Review: MEMS sensors for flow separation detection

Zaheer Abbas, Mohtashim Mansoor, Muzaffar Habib, Zahid Mehmood

Technical Paper

Modelling of a MEMS switch for high-speed sampling circuits using artificial neural network perspective

S. Kanthamani, J. Joslin Percy, S. Mohamed Mansoor Roomi

Technical Paper

Design and performance analysis of ohmic contact based SPMT RF MEMS switch

K. Rajasekhar, K. GirijaSravani, K. Srinivasa Rao

Technical Paper

Dynamic rate-dependent hysteresis modeling and trajectory prediction of voice coil motors based on TF-NARX neural network

Rui Lin, Yingzi Li, Zeyu Xu, Peng Cheng, Xiaodong Gao, Wendong Sun, Yifan Hu, Quan Yuan, Jianqiang Qian

Technical Paper

Design and analysis of a compliant microgripper with a large amplification ratio

Zhongyi Guo, Haifeng Ma, Quhao Li, Yangmin Li, Zhanqiang Liu, Qinghua Song

Technical Paper

The combined effects of temperature and relative humidity on resonant frequency and quality factor of MEMS beam resonators in atmospheric pressure and gas rarefaction

Quoc Cuong Le, Minh Truong Phan, Xuan Thang Trinh, Huu Ly Truong, Vo Ke Thanh Ngo, Chi Cuong Nguyen

Technical Paper

Performance analysis of a combined rhinoceros horn and V-channel valveless piezoelectric pump

Lipeng He, Renhui Hu, Dianbin Hu, Limin Zhang, Yuhang Han, Guangming Cheng

Technical Paper

An integrated and automated digital microfluidic device for dairy milk droplet actuation

Rahul Eswar, C. Harrison Brodie, Hajer Reguigui, Christopher M. Collier