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Published in:
01-10-2013
Combined effect of substrate temperature and laser energy density on laser ablated BiFeO3 thin films
Published in: Journal of Materials Science: Materials in Electronics | Issue 10/2013
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Abstract
Bismuth ferrite (BiFeO3) thin films were prepared on Pt(111)/Ti/SiO2/Si substrates by laser ablation deposition at various substrate temperature (T
sub) and laser energy density (D
L). The combined effect of T
sub and D
L on crystalline phase, preferential orientation and surface morphology of the films were investigated. The microstructure and morphology of the films showed a strong dependence on T
sub and D
L simultaneously. BiFeO3 thin films with single phase could be prepared at T
sub-D
L of 893 K−1 J/cm2, 943 K−2 J/cm2 and 963 K−3 J/cm2, respectively. Film deposited at T
sub = 963 K and D
L = 3 J/cm2 exhibited better ferroelectric property due to the combination of high (111) preferential orientation, dense surface morphology and less Fe2+ content.