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18-07-2019 | Technical Paper

Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Authors: Ashish Kumar, Mahanth Prasad, Vijay Janyani, R. P. Yadav

Published in: Microsystem Technologies | Issue 12/2019

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Abstract

This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The proposed structure has been simulated using finite element method (FEM) based MEMS-CAD tool Coventorware and optimized the dimensions of the diaphragm for a large dynamic range of 100-180 dB sound pressure level (SPL) and large bandwidth (22 kHz). The resonant frequency of the simulated structure is 67 kHz. Optimized structure dimensions have been chosen and fabricated the structure. The diaphragm structure has been released using bulk micromachining wet etching process. The ZnO thin film of 1.71 µm has been deposited using radio frequency (RF) sputtering technique and characterized using X-ray powder diffraction (XRD) and atomic force microscopy (AFM). The resonant frequency of the fabricated device is measured using laser doppler vibrometer (LDV) and found to be 65 kHz. The experimental sensitivity of the fabricated device is measured and is found to be 80 μV/Pa. The reliability testing of the fabricated structure was performed. The maximum current that can be passed across aluminum (Al) and deposited ZnO edge was found to be 2.69 A without any damage. The electrical characterization such as capacitance, loss (tan \(\delta\)) of fabricated device parameters were measured and the effects of frequency variation on both were also studied.

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Ali WR, Prasad M (2015) Design and fabrication of microtunnel and Si-diaphragm for ZnO based MEMS acoustic sensor for high SPL and low frequency application. Microsyst Technol 21:1249–1255. https://doi.org/10.1007/s00542-014-2291-8 CrossRef

Ansari SG, Dar MA, Dhage MS et al (2007) Low temperature deposition and effect of plasma power on tin oxide thin films prepared by modified plasma enhanced chemical vapor deposition. J Appl Phys. https://doi.org/10.1063/1.2786612 CrossRef

Assouar MB, Elmazria O, Elhakiki M, Alnot P (2004) Study of structural and microstructural properties of AlN films deposited on silicon and quartz substrates for surface acoustic wave devices. J Vac Sci Technol B Microelectron Nanometer Struct 22:1717. https://doi.org/10.1116/1.1767196 CrossRef

Bertacchini A, Scorcioni S, Dondi D et al (2011) AlN-based MEMS devices for vibrational energy harvesting applications. Eur Solid State Device Res Conf. https://doi.org/10.1109/essderc.2011.6044220 CrossRef

Calero D, Paul S, Gesing A et al (2018) A technical review and evaluation of implantable sensors for hearing devices. Biomed Eng Online 17:1–26. https://doi.org/10.1186/s12938-018-0454-z CrossRef

Cham Ferblantier G, Mailly F, Al Asmar R et al (2005) Deposition of zinc oxide thin films for application in bulk acoustic wave resonator. Sens Actuators A Phys 122:184–188. https://doi.org/10.1016/j.sna.2005.04.009 CrossRef

Chen D, Song S, Ma J et al (2017) Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring. Biosens Bioelectron 91:465–471. https://doi.org/10.1016/j.bios.2016.12.063 CrossRef

Curry EJ, Ke K, Chorsi MT et al (2018) Biodegradable piezoelectric force sensor. Proc Natl Acad Sci 115:909–914. https://doi.org/10.1073/pnas.1710874115 CrossRef

Dey N, Ashour AS, Mohamed WS, Nguyen NG (2019) Acoustic sensors for biomedical applications. Springer, New YorkCrossRef

Flatscher M, Dielacher M, Herndl T et al (2017) Gas pipeline leakage detection based on PZT sensors. Sens Actuators A Phys 283:1–9. https://doi.org/10.1088/0960-1317/16/9/S02 CrossRef

Fu YQ, Luo JK, Du XY et al (2010) Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sens Actuators B Chem 143:606–619. https://doi.org/10.1016/j.snb.2009.10.010 CrossRef

Giovanni MD (1982) Flat and corrugated membrane design handbook. Mercel Dekker Inc, New York

Hasan SA, Gibson D, Song S et al (2017) ZnO thin film based flexible temperature sensor. Proc IEEE Sens. https://doi.org/10.1109/icsens.2017.8234387 CrossRef

Hindrichsen CC, Almind NS, Brodersen SH et al (2009) Analytical model of a PZT thick-film triaxial accelerometer for optimum design. IEEE Sens J 9:419–429. https://doi.org/10.1109/JSEN.2009.2014412 CrossRef

Hou R, Fu YQ, Hutson D et al (2016) Use of sputtered zinc oxide film on aluminium foil substrate to produce a flexible and low profile ultrasonic transducer. Ultrasonics 68:54–60. https://doi.org/10.1016/j.ultras.2016.02.008 CrossRef

Huang IY, Lee MC (2008) Development of a FPW allergy biosensor for human IgE detection by MEMS and cystamine-based SAM technologies. Sens Actuators B Chem 132:340–348. https://doi.org/10.1016/j.snb.2008.01.048 CrossRef

Janson SW (2005) Aerospace applications of MEMS. In: Proceedings of SPIE, vol 5717. MEMS/MOEMS components and their applications II. https://doi.org/10.1002/0470014229.ch1

Jones IL, Livi P, Lewandowska MK et al (2011) The potential of microelectrode arrays and microelectronics for biomedical research and diagnostics. Anal Bioanal Chem 399:2313–2329. https://doi.org/10.1007/s00216-010-3968-1 CrossRef

Krishnamoorthy U, Olsson RH, Bogart GR et al (2008) In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. Sens Actuators A Phys 145–146:283–290. https://doi.org/10.1016/j.sna.2008.03.017 CrossRef

Laine J, Mougenot D (2014) A high-sensitivity MEMS-based accelerometer. Lead Edge 33:1234–1242. https://doi.org/10.1190/tle33111234.1 CrossRef

Lee WS, Lee SS (2008) Piezoelectric microphone built on circular diaphragm. Sens Actuators A Phys 144:367–373. https://doi.org/10.1016/j.sna.2008.02.001 CrossRef

Lee JS, Shin KY, Cheong OJ et al (2015) Highly sensitive and multifunctional tactile sensor using free-standing ZnO/PVDF thin film with graphene electrodes for pressure and temperature monitoring. Sci Rep 5:1–8. https://doi.org/10.1038/srep07887 CrossRef

Lin SS, Huang JL (2004) Effect of thickness on the structural and optical properties of ZnO films by r.f. magnetron sputtering. Surf Coat Technol 185:222–227. https://doi.org/10.1016/j.surfcoat.2003.11.014 CrossRef

Littrell R, Grosh K (2012) Modeling and characterization of cantilever-based MEMS piezoelectric sensors and actuators. J Microelectromechanical Syst 21:406–413. https://doi.org/10.1109/JMEMS.2011.2174419 CrossRef

Muralt P, Member S, Ledermann N et al (2005) Transducers based on PZT thin FILMS. IEEE Trans Ultrason Ferroelectr Freq Control 52:2276–2288CrossRef

Nelson G, Rajamani R (2017) Accelerometer-based acoustic control: enabling auscultation on a Black Hawk Helicopter. IEEE/ASME Trans Mechatron 22:994–1003. https://doi.org/10.1109/TMECH.2016.2603444 CrossRef

Ondo-Ndong R, Ferblantier G, Al Kalfioui M et al (2003) Properties of RF magnetron sputtered zinc oxide thin films. J Cryst Growth 255:130–135. https://doi.org/10.1016/S0022-0248(03)01243-0 CrossRef

Ozdogan M, Towfighian S (2016) A MEMS microphone using repulsive force sensors. In: Volume 4: 21st design for manufacturing and the life cycle conference; 10th international conference on micro- and nanosystems. ASME

Park M, Gao Y (2008) Error and performance analysis of MEMS-based inertial sensors with a low-cost GPS receiver. Sensors 8:2240–2261. https://doi.org/10.3390/s8042240 CrossRef

Prasad M, Sahula V, Khanna VK (2013) Design and fabrication of Si-diaphragm, ZnO piezoelectric film-based MEMS acoustic sensor using SOI wafers. IEEE Trans Semicond Manuf 26:233–241. https://doi.org/10.1109/TSM.2013.2238956 CrossRef

Prasad M, Sahula V, Khanna VK (2014) ZnO etching and microtunnel fabrication for high-reliability MEMS acoustic sensor. IEEE Trans Device Mater Reliab 14:545–554. https://doi.org/10.1109/TDMR.2013.2271245 CrossRef

Qiu Y, Gigliotti J, Wallace M et al (2015) Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging. Sensors 15:8020–8041. https://doi.org/10.3390/s150408020 CrossRef

Reagan T, Meloy J, Underbrink JR, Sheplak M (2017) Fabrication and characterization of a flush-mount MEMS piezoelectric dynamic pressure sensor and associated package for aircraft fuselage arrays. In: 55th AIAA Aerosp Sci Meet, pp 1–9. https://doi.org/10.2514/6.2017-0477

Ren T, Zhao H, Liu L, Li Z (2003) Piezoelectric and ferroelectric films for microelectronic applications. Mater Sci Eng 99:159–163CrossRef

Saboonchi H, Ozevin D, Kabir M (2016) MEMS sensor fusion: acoustic emission and strain. Sens Actuators A Phys 247:566–578. https://doi.org/10.1016/j.sna.2016.05.014 CrossRef

Said MH, Tounsi F, Mezghani B, Ahmed A, Pandit S, Patkar R, Dixit P, Baghin MS, Rao VR (2018) Induced stress enhancement using U-shaped arms in a 3-axis piezoresistive MEMS accelerometer. In: 2018 15th International Multi-Conference on Systems, Signals & Devices (SSD). IEEE, Hammamet, Tunisia, pp 1481–1486. https://doi.org/10.1109/SSD.2018.8570360 CrossRef

Saxena S, Sharma R, Pant BD (2018) Fabrication and sensitivity analysis of guided beam piezoelectric energy harvester. IEEE Trans Electron Devices 65:5123–5129. https://doi.org/10.1109/TED.2018.2869690 CrossRef

Sheplak M (2017) MEMS-Based acoustic sensors for fluid mechanics and aeroacoustics. J Acoust Soc Am 141:3721. https://doi.org/10.1121/1.4988150 CrossRef

Sheplak M, Seiner J, Breuer K, Schmidt M (1999) A MEMS microphone for aeroacoustics measurements. In: 37th aerospace sciences meeting and exhibit. American Institute of Aeronautics and Astronautics, Reston, NV, USA. https://doi.org/10.2514/6.1999-606 CrossRef

Spearing SM, Ayón AA, Ghodssi R et al (2002) Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films. Sens Actuators A Phys 91:373–380. https://doi.org/10.1016/s0924-4247(01)00610-0 CrossRef

Sridhar V, Takahata K (2009) A hydrogel-based passive wireless sensor using a flex-circuit inductive transducer. Sens Actuators A Phys 155:58–65. https://doi.org/10.1016/j.sna.2009.08.010 CrossRef

Tang G, Liu JQ, Liu HS et al (2017) Diaphragm design guidelines and an optical pressure sensor based on MEMS technique. Sens Actuators A Phys 155:1–9. https://doi.org/10.1109/JMEMS.2011.2174419 CrossRef

Thornton KEB, Uttamchandani D, Culshaw B (1986) Temperature dependence of resonant frequency in optically excited diaphragms. Electron Lett 22:1232–1234. https://doi.org/10.1049/el:19860845 CrossRef

Tiete J, Domínguez F, da Silva B et al (2014) SoundCompass: a distributed MEMS microphone array-based sensor for sound source localization. Sensors (Switzerland) 14:1918–1949. https://doi.org/10.3390/s140201918 CrossRef

Voiculescu I, Nordin AN (2012) Acoustic wave based MEMS devices for biosensing applications. Biosens Bioelectron 33:1–9. https://doi.org/10.1016/j.bios.2011.12.041 CrossRef

Wang L, Wolf RA, Wang Y et al (2003) Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers. J Microelectromechanical Syst 12:433–439CrossRef

Wang Z, Wang C, Liu L (2005) Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity. IEEE Trans Ultrason Ferroelectr Freq Control 52:1840–1850. https://doi.org/10.1109/TUFFC.2005.1561640 CrossRef

Wang Z, Miao J, Tan CW, Xu T (2010) Fabrication of piezoelectric MEMS devices-from thin film to bulk PZT wafer. J Electroceramics 24:25–32. https://doi.org/10.1007/s10832-008-9454-x CrossRef

Williams MD, Griffin BA, Reagan TN et al (2012) An AlN MEMS piezoelectric microphone for aeroacoustic applications. J Microelectromechanical Syst 21:270–283. https://doi.org/10.1109/JMEMS.2011.2176921 CrossRef

Wilson WC, Moore JP, Juarez PD (2016) Surface acoustic wave vibration sensors for measuring aircraft flutter. In: 2016 IEEE international conference on prognostics and health management (ICPHM). IEEE, Ottawa, ON, Canada, pp 1–7. https://doi.org/10.1109/ICPHM.2016.7542855 CrossRef

Xu R, Lei A, Dahl-Petersen C et al (2012) Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting. Sens Actuators A Phys 188:383–388. https://doi.org/10.1016/j.sna.2011.12.035 CrossRef

Yamashita K, Chansomphou L, Murakami H, Okuyama M (2004) Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning. Sens Actuators A Phys 114:147–153. https://doi.org/10.1016/j.sna.2003.11.015 CrossRef

Yang S, Lin BH, Liu W-R et al (2009) Structural characteristics and annealing effect of ZnO epitaxial films grown by atomic layer deposition. Cryst Growth Des 9:5184–5189. https://doi.org/10.1021/cg900580r CrossRef

Zargarpour N, Zarifi MH (2015) A piezoelectric micro-electromechanical microphone for implantable hearing aid applications. Microsyst Technol 21:893–902. https://doi.org/10.1007/s00542-014-2134-7 CrossRef

Zargarpourfardin N (2014) A New Method for Using Piezoelectric Diaphragm in Implantable. Adv Biores 5:48–52. https://doi.org/10.15515/abr.0976-4585.5.4852 CrossRef

Zhang Z, Xu J, Yang L et al (2018) Design and comparison of PMN-PT single crystals and PZT ceramics based medical phased array ultrasonic transducer. Sens Actuators A Phys 283:273–281. https://doi.org/10.1016/j.sna.2018.09.067 CrossRef

Zhao MH, Wang ZL, Mao SX (2004) Piezoelectric characterization individual zinc oxide nanobelt probed by piezoresponse force microscope. Nano Lett 4:587–590. https://doi.org/10.1021/nl035198a CrossRef

Title: Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
Authors: Ashish Kumar
Mahanth Prasad
Vijay Janyani
R. P. Yadav
Publication date: 18-07-2019
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 12/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-019-04524-x

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