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Microsystem Technologies

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01-02-2013 | Technical Paper

Electromagnetically force balanced polymer accelerometer

Authors: Ji Li, Werner K. Schomburg

Published in: Microsystem Technologies | Issue 2/2013

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Abstract

An acceleration sensor from polymer has been developed which balances a proof mass by magnetic forces. The sensor is fabricated from a polyimide membrane with conductor paths from gold patterned by photolithography and etching, a frame manufactured by ultrasonic hot embossing, and permanent magnets fixed to the frame. Except the conductor path and permanent magnets, all components are made of polymers on a planar substrate, and then the frame is kinked forming the desired three-dimensional structure. In a first try, a sensitivity of 0.46 V/(m/s²) was achieved, and cross axis sensitivity error was less than 3 %.

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Title: Electromagnetically force balanced polymer accelerometer
Authors: Ji Li
Werner K. Schomburg
Publication date: 01-02-2013
Publisher: Springer-Verlag
Published in: Microsystem Technologies / Issue 2/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-012-1558-1

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