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Microsystem Technologies
Published in: Microsystem Technologies 4/2016

01-02-2015 | Technical Paper

Electromechanical modeling and simulation by the Euler–Lagrange method of a MEMS inertial sensor using a FGMOS as a transducer

Authors: G. Stephany Abarca-Jiménez, M. Alfredo Reyes-Barranca, Salvador Mendoza-Acevedo, Jacobo E. Munguía-Cervantes, Miguel A. Alemán-Arce

Published in: Microsystem Technologies | Issue 4/2016

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Abstract

In this paper, the elec tromechanical modeling of a differential capacitive sensor interconnected with a floating-gate MOS (FGMOS) transistor is shown; the model was obtained using the Euler–Lagrange theory to analyze this particular physical system used as an inertial sensor. A design methodology is also shown relating all the physical parameters involved, such as: stiffness, damping associated with the capacitive structure, parasitic capacitances present in the transistor, and the maximum operating voltages to avoid pull-in effect. Cases for symmetric and non symmetric differential capacitance comb arrays are analyzed. A model comparison between conventional mass–spring–damper mechanical systems to a specific electromechanical system for capacitive sensor with its associated readout electronics is shown.
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Literature
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Mezghani B, Tounsi F, Masmoudi M (2013) Sensitivity modeling of dual-axis CMOS MEMS convective accelerometers using FEM and spherical model (©EDA Publishing)
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Su Y, Chong CS (2005) Automatic mixed-dimensional MEMS modeling. International Conference on Advanced Intelligent Mechatronics (IEEE/ASME), pp 24–28
Van Toan N, Ono T (2014) Capacitive silicon resonator structure with movable electrodes to reduce capacitive gap widths based on electrostatic parallel plate actuation. MEMS, San FranciscoCrossRef
Zeng K, Liu Z, Korvink JG (2003) A new methodology for modeling MEMS structures. Design, Test, Integration and Packaging of MEMSiMOEMS (DTIP)
Zeng Z, Yang H, Zhao R, Tang S, Chen LI (2011) An electromechanical coupling model for an inclined drum washing machine vibration system based on Euler–Lagrange theory. International Electric Machines and Drives Conference (IEMDC) (IEEE)
Zhang Z, Liu H (2007) L2-gain control for single-phase active power filter using Euler–Lagrange model. International Symposium on Industrial Electronics, ISIE (IEEE), pp 2469–2474
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Metadata
Title
Electromechanical modeling and simulation by the Euler–Lagrange method of a MEMS inertial sensor using a FGMOS as a transducer
Authors
G. Stephany Abarca-Jiménez
M. Alfredo Reyes-Barranca
Salvador Mendoza-Acevedo
Jacobo E. Munguía-Cervantes
Miguel A. Alemán-Arce
Publication date
01-02-2015
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2429-3

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