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01-07-2010 | Technical Paper | Issue 7/2010

Microsystem Technologies 7/2010

Fabrication of internally driven micro centrifugal force pumps based on synchronous micro motors

Journal:
Microsystem Technologies > Issue 7/2010
Authors:
Andreas Waldschik, Stephanus Büttgenbach

Abstract

In this paper, the fabrication process and mounting of a micro centrifugal force pump based on a synchronous motor is presented. The pump unit as well as the electromagnetic drive unit is fully integrated and mainly realized by means of micro fabrication technologies including UV-depth lithography and electroplating. Furthermore, one specialty is the application of polymer magnets which allow a miniaturization of the toothed rotor down to 2 mm. The presented pump reveals a promising basic concept for other micro rotary pumps like spiral, impeller, or gear pumps.

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