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Microsystem Technologies
Published in: Microsystem Technologies 7/2010

01-07-2010 | Technical Paper

Fabrication of internally driven micro centrifugal force pumps based on synchronous micro motors

Authors: Andreas Waldschik, Stephanus Büttgenbach

Published in: Microsystem Technologies | Issue 7/2010

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Abstract

In this paper, the fabrication process and mounting of a micro centrifugal force pump based on a synchronous motor is presented. The pump unit as well as the electromagnetic drive unit is fully integrated and mainly realized by means of micro fabrication technologies including UV-depth lithography and electroplating. Furthermore, one specialty is the application of polymer magnets which allow a miniaturization of the toothed rotor down to 2 mm. The presented pump reveals a promising basic concept for other micro rotary pumps like spiral, impeller, or gear pumps.
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Literature
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Feldmann M, Büttgenbach S (2006) Novel versatile electromagnetic micro actuators with integrated polymer magnets: concept, fabrication, and test. Proc Actuator 2006, pp 709–712
Feldmann M, Waldschik A, Büttgenbach S (2008) Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers. Proc Nanotech 3:450–453
Haeberle S, Brenner T, Schlosser HP, Zengerle R, Ducrée J (2005) Centrifugal micromixer. Chem Eng Technol. 28(5):613–616CrossRef
Iverson BD, Garimella SV (2008) Recent advances in microscale pumping technologies: a review and evaluation. J Microfluid Nanofluid 5:145–174CrossRef
Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14:R35–R64CrossRef
Nguyen NT, Huang X, Chuan TK (2002) MEMS-micropumps: a review. Transactions of the ASME 124:384–392
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Metadata
Title
Fabrication of internally driven micro centrifugal force pumps based on synchronous micro motors
Authors
Andreas Waldschik
Stephanus Büttgenbach
Publication date
01-07-2010
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 7/2010
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-010-1051-7

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