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Microsystem Technologies
Published in: Microsystem Technologies 10-11/2011

01-10-2011 | Technical Paper

Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques

Authors: Qiuping Chen, Qiuling Chen, Gabriele Maccioni, Adriano Sacco, Luciano Scaltrito, Monica Ferraris, Sergio Ferrero

Published in: Microsystem Technologies | Issue 10-11/2011

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Abstract

A micro structured master prototype for imprint lithography in glass has been successfully fabricated by using a Q-switched Nd:YVO4 Diode-pumped solid state laser writing in Nickel-based alloy. The micro-structures in the prototype were characterized using an optical microscope, scanning electron microscopy, surface profilometer and field emission scanning electron microscopy. The surface quality of the fabricated master prototype was further improved through the process of polishing and cleaning. Then the master prototype was used for imprinting a soda lime glass substrate under the optimized imprinting conditions that have been previously studied for lab-on-chip devices. The results showed that very good quality transfer of the micro structures from the prototype master to the glass substrate was obtained.
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Metadata
Title
Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques
Authors
Qiuping Chen
Qiuling Chen
Gabriele Maccioni
Adriano Sacco
Luciano Scaltrito
Monica Ferraris
Sergio Ferrero
Publication date
01-10-2011
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 10-11/2011
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1348-1

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