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Microsystem Technologies

Issue 10-11/2011

Content (15 Articles)

Review Paper

The development of two-component micro powder injection moulding and sinter joining

Andreas Ruh, Katharina Klimscha, Volker Piotter, Klaus Plewa, Hans-Joachim Ritzhaupt-Kleissl, Jürgen Fleischer

Review Article

Microelectromechanical resonators for radio frequency communication applications

Joydeep Basu, Tarun Kanti Bhattacharyya

Review Paper

A new transparent Bio-MEMS for uni-axial single cell stretching

R. Fior, S. Maggiolino, M. Lazzarino, O. Sbaizero

Technical Paper

Analysis and suppression of spurious modes of the ring shape anchored RF MEMS contour mode disk resonator

Masoud Baghelani, Habib Badri Ghavifekr, Afshin Ebrahimi

Technical Paper

Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques

Qiuping Chen, Qiuling Chen, Gabriele Maccioni, Adriano Sacco, Luciano Scaltrito, Monica Ferraris, Sergio Ferrero

Technical Paper

Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110)

Shankar Dutta, Md Imran, P. Kumar, R. Pal, P. Datta, R. Chatterjee

Technical Paper

Air-coupled linear and sparse cMUT array manufactured using MUMPs process

Alberto Octavio, Richard L. O’Leary, Simon M. Whiteley, Óscar Martínez-Graullera, Carlos J. Martín-Arguedas, Luis Gómez-Ullate, Francisco Montero de Espinosa

Technical Paper

Reduction of torque ripple and mechanical vibration of spindle motors in hard-disk drives using a sinusoidal driver

Phunlap Mekkemthong, Kittiwat Chiangchin, Surapong Suwankawin

Technical Paper

Fabrication of metallic micromirror using electroplating technology

Jia-dong Li, Ping Zhang, Yi-hui Wu, Yong-shun Liu, Ming Xuan

Technical Paper

Innovative design of hollow polymeric microneedles for transdermal drug delivery

Marion Sausse Lhernould, A. Delchambre